GB1021776A - Creación de Inventos y Patentes con Inteligencia Artificial

GB1021776A – – Google Patents

Info

Publication number
GB1021776A

GB1021776A
GB51326/64A
GB5132664A
GB1021776A
GB 1021776 A
GB1021776 A
GB 1021776A
GB 51326/64 A
GB51326/64 A
GB 51326/64A
GB 5132664 A
GB5132664 A
GB 5132664A
GB 1021776 A
GB1021776 A
GB 1021776A
Authority
GB
United Kingdom
Prior art keywords
evaporant
wall
vapour
chamber
passes
Prior art date
1963-12-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Application number
GB51326/64A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

International Business Machines Corp

Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1963-12-23
Filing date
1964-12-17
Publication date
1966-03-09

1964-12-17
Application filed by International Business Machines Corp
filed
Critical
International Business Machines Corp

1966-03-09
Publication of GB1021776A
publication
Critical
patent/GB1021776A/en

Status
Expired
legal-status
Critical
Current

Links

Espacenet

Global Dossier

Discuss

Classifications

C—CHEMISTRY; METALLURGY

C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL

C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL

C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

C23C14/24—Vacuum evaporation

C23C14/28—Vacuum evaporation by wave energy or particle radiation

C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

H01J37/32—Gas-filled discharge tubes

H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Abstract

Apparatus for providing vapours of a sublimable evaporant for vapour deposition in a vacuum comprises an annular evaporant chamber 4 with an inner grid wall 6 which is heated by electron bombardment, the wall 6 acting as anode to the thermionic cathode 24. The generated vapour passes through the grid wall 6 where any solid evaporant which also passes through becomes charged and is drawn either to the hot cathode 24 or to the hot wall 6. The vapour escapes from the chamber 2 through an annular opening 16 in the cover 12 to pass to the substrate to be coated. The side walls and covers 8, 12, 10 are backed by heat shelds 43, 44, 46; 53; and 40, 42 respectively. A cooling coil 50 is also provided. The evaporant specifically mentioned is silicon monoxide, but the apparatus is applicable to both dielectric and conductive materials.

GB51326/64A
1963-12-23
1964-12-17

Expired

GB1021776A
(en)

Applications Claiming Priority (1)

Application Number
Priority Date
Filing Date
Title

US332587A

US3244857A
(en)

1963-12-23
1963-12-23
Vapor deposition source

Publications (1)

Publication Number
Publication Date

GB1021776A
true

GB1021776A
(en)

1966-03-09

Family
ID=23298897
Family Applications (1)

Application Number
Title
Priority Date
Filing Date

GB51326/64A
Expired

GB1021776A
(en)

1963-12-23
1964-12-17

Country Status (6)

Country
Link

US
(1)

US3244857A
(en)

DE
(1)

DE1298381B
(en)

FR
(1)

FR1436585A
(en)

GB
(1)

GB1021776A
(en)

NL
(1)

NL6414696A
(en)

SE
(1)

SE304893B
(en)

Cited By (2)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

GB2176337B
(en)

1985-06-04
1990-02-14
English Electric Valve Co Ltd
Metal vapour laser apparatus

DE4439519C1
(en)

1994-11-04
1996-04-25
Fraunhofer Ges Forschung
Appts. for vacuum coating strip with e.g. aluminium@ or dielectric

Families Citing this family (6)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

US3344768A
(en)

1965-08-30
1967-10-03
Burroughs Corp
Powder evaporation apparatus

US3450097A
(en)

1965-09-10
1969-06-17
Us Army
Vapor deposition apparatus

US3466424A
(en)

1967-08-31
1969-09-09
Nasa
Evaporant source for vapor deposition

US3538305A
(en)

1969-05-16
1970-11-03
Us Navy
Alloy deterring shunt for conical tungsten evaporation sources

US4002880A
(en)

1975-08-13
1977-01-11
Gte Sylvania Incorporated
Evaporation source

DE3530106A1
(en)

1985-08-23
1987-02-26
Kempten Elektroschmelz Gmbh

VAPORIZATION MATERIAL FOR VAPORIZING INORGANIC COMPOUNDS BY MEANS OF A PHOTON-GENERATING RADIATION HEATING SOURCE IN CONTINUOUSLY OPERATED VACUUM VACUUM DEVICES

Family Cites Families (7)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

DE882173C
(en)

1941-08-24
1953-07-06
Siemens Ag

Device for the production of thin coating layers from vaporized substances by condensation

NL85130C
(en)

1953-01-26

DE961772C
(en)

1955-08-06
1957-04-11
Vacuumtechnik A G

Method and arrangement for vaporizing metals to be applied to carrier material such as paper webs, in particular aluminum, in a high vacuum

US2998376A
(en)

1956-10-29
1961-08-29
Temescal Metallurgical Corp
High-vacuum evaporator

NL253747A
(en)

1959-07-13

US3153137A
(en)

1961-10-13
1964-10-13
Union Carbide Corp
Evaporation source

US3129315A
(en)

1961-12-26
1964-04-14
Lear Siegler Inc
Vacuum vaporizing fixture

1963

1963-12-23
US
US332587A
patent/US3244857A/en
not_active
Expired – Lifetime

1964

1964-12-16
SE
SE15203/64A
patent/SE304893B/xx
unknown

1964-12-17
NL
NL6414696A
patent/NL6414696A/xx
unknown

1964-12-17
GB
GB51326/64A
patent/GB1021776A/en
not_active
Expired

1964-12-18
DE
DEI27154A
patent/DE1298381B/en
active
Pending

1964-12-23
FR
FR999733A
patent/FR1436585A/en
not_active
Expired

Cited By (2)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

GB2176337B
(en)

1985-06-04
1990-02-14
English Electric Valve Co Ltd
Metal vapour laser apparatus

DE4439519C1
(en)

1994-11-04
1996-04-25
Fraunhofer Ges Forschung
Appts. for vacuum coating strip with e.g. aluminium@ or dielectric

Also Published As

Publication number
Publication date

FR1436585A
(en)

1966-04-29

US3244857A
(en)

1966-04-05

NL6414696A
(en)

1965-06-24

SE304893B
(en)

1968-10-07

DE1298381B
(en)

1969-06-26

Información de contacto