GB1064041A

GB1064041A – Improvements in or relating to methods of manufacturing semiconductor devices
– Google Patents

GB1064041A – Improvements in or relating to methods of manufacturing semiconductor devices
– Google Patents
Improvements in or relating to methods of manufacturing semiconductor devices

Info

Publication number
GB1064041A

GB1064041A
GB7585/64A
GB758564A
GB1064041A
GB 1064041 A
GB1064041 A
GB 1064041A
GB 7585/64 A
GB7585/64 A
GB 7585/64A
GB 758564 A
GB758564 A
GB 758564A
GB 1064041 A
GB1064041 A
GB 1064041A
Authority
GB
United Kingdom
Prior art keywords
electrode material
semi
highly
electrode
layer
Prior art date
1963-03-29
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Application number
GB7585/64A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Philips Electronics UK Ltd

Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1963-03-29
Filing date
1964-03-29
Publication date
1967-04-05

1964-03-29
Application filed by Philips Electronic and Associated Industries Ltd
filed
Critical
Philips Electronic and Associated Industries Ltd

1967-04-05
Publication of GB1064041A
publication
Critical
patent/GB1064041A/en

Status
Expired
legal-status
Critical
Current

Links

Espacenet

Global Dossier

Discuss

Classifications

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor

H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions

H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes

C—CHEMISTRY; METALLURGY

C07—ORGANIC CHEMISTRY

C07J—STEROIDS

C07J1/00—Normal steroids containing carbon, hydrogen, halogen or oxygen, not substituted in position 17 beta by a carbon atom, e.g. estrane, androstane

C—CHEMISTRY; METALLURGY

C07—ORGANIC CHEMISTRY

C07J—STEROIDS

C07J75/00—Processes for the preparation of steroids in general

C—CHEMISTRY; METALLURGY

C30—CRYSTAL GROWTH

C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR

C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor

C30B31/04—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the liquid state

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer

H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer

H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials

H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer

H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials

H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities

H01L21/228—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a liquid phase, e.g. alloy diffusion processes

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer

H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials

H01L21/24—Alloying of impurity materials, e.g. doping materials, electrode materials, with a semiconductor body

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor

H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched

H01L29/70—Bipolar devices

H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals

H01L29/73—Bipolar junction transistors

Abstract

1,064,041. Semi-conductor devices. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. March 29, 1964 [March 29, 1963; Sept. 25, 1963], No. 7585/64. Heading HIK. An electrode material is alloyed to the surface of a semi-conductor body to form a highly-conductive recrystallized layer and is heated further in contact with an adjacent surface concentration of at least 3 x 1018 atoms per cc. of active impurities forming a second highly-conductive surface layer connected to a second electrode, the first electrode material having a gettering action on the active impurities of the second layer so as to produce an effective decrease in the local conductivity in the immediate vicinity of the alloyed electrode material. The first electrode material may also have a masking action, enabling the second highly-conductive surface layer to be at least completed by means of diffusion during the alloying of the electrode material and the further heating. Suggested impurities include arsenic and antimony, with various alloys based on aluminium and/or indium as electrode materials, the semi-conductor body being preferably germanium but possibly silicon or an A III B v compound.

GB7585/64A
1963-03-29
1964-03-29
Improvements in or relating to methods of manufacturing semiconductor devices

Expired

GB1064041A
(en)

Applications Claiming Priority (2)

Application Number
Priority Date
Filing Date
Title

NL290930

1963-03-29

NL298354

1963-09-25

Publications (1)

Publication Number
Publication Date

GB1064041A
true

GB1064041A
(en)

1967-04-05

Family
ID=26641896
Family Applications (2)

Application Number
Title
Priority Date
Filing Date

GB7585/64A
Expired

GB1064041A
(en)

1963-03-29
1964-03-29
Improvements in or relating to methods of manufacturing semiconductor devices

GB7583/64A
Expired

GB1065951A
(en)

1963-03-29
1964-03-29
Improvements in or relating to methods of manufacturing semiconductor devices

Family Applications After (1)

Application Number
Title
Priority Date
Filing Date

GB7583/64A
Expired

GB1065951A
(en)

1963-03-29
1964-03-29
Improvements in or relating to methods of manufacturing semiconductor devices

Country Status (5)

Country
Link

US
(2)

US3333997A
(en)

BE
(2)

BE643481A
(en)

DE
(2)

DE1270694B
(en)

GB
(2)

GB1064041A
(en)

NL
(2)

NL298354A
(en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

DE1274245B
(en)

*

1965-06-15
1968-08-01
Siemens Ag

Semiconductor rectifier diode for heavy current

US3534231A
(en)

*

1968-02-15
1970-10-13
Texas Instruments Inc
Low bulk leakage current avalanche photodiode

Family Cites Families (10)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

NL94467C
(en)

*

1954-02-27

DE1036393B
(en)

*

1954-08-05
1958-08-14
Siemens Ag

Process for the production of two p-n junctions in semiconductor bodies, e.g. B. area transistors

NL110588C
(en)

*

1955-03-10

DE1058632B
(en)

*

1955-12-03
1959-06-04
Deutsche Bundespost

Method for the arbitrary reduction of the blocking resistance of an alloy electrode of semiconductor arrangements

US2836523A
(en)

*

1956-08-02
1958-05-27
Bell Telephone Labor Inc
Manufacture of semiconductive devices

AT204604B
(en)

*

1956-08-10
1959-08-10
Philips Nv

Process for producing a semiconducting storage layer system and a semiconducting barrier layer system

BE560901A
(en)

*

1956-10-01

US2974072A
(en)

*

1958-06-27
1961-03-07
Ibm
Semiconductor connection fabrication

US3165429A
(en)

*

1962-01-31
1965-01-12
Westinghouse Electric Corp
Method of making a diffused base transistor

NL298286A
(en)

*

1962-09-24

0

NL
NL290930D
patent/NL290930A/xx
unknown

NL
NL298354D
patent/NL298354A/xx
unknown

1964

1964-02-06
BE
BE643481A
patent/BE643481A/xx
unknown

1964-02-06
BE
BE643479A
patent/BE643479A/xx
unknown

1964-02-07
DE
DEP1270A
patent/DE1270694B/en
active
Pending

1964-02-07
DE
DEN24408A
patent/DE1297235B/en
active
Pending

1964-02-20
US
US346191A
patent/US3333997A/en
not_active
Expired – Lifetime

1964-02-20
US
US346162A
patent/US3323955A/en
not_active
Expired – Lifetime

1964-03-29
GB
GB7585/64A
patent/GB1064041A/en
not_active
Expired

1964-03-29
GB
GB7583/64A
patent/GB1065951A/en
not_active
Expired

Also Published As

Publication number
Publication date

US3323955A
(en)

1967-06-06

US3333997A
(en)

1967-08-01

NL290930A
(en)

GB1065951A
(en)

1967-04-19

BE643479A
(en)

1964-08-06

NL298354A
(en)

DE1270694B
(en)

1968-06-20

DE1297235B
(en)

1969-06-12

BE643481A
(en)

1964-08-06

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