GB1359926A – Induced electron emission spectrometer using plural radiation sources
– Google Patents
GB1359926A – Induced electron emission spectrometer using plural radiation sources
– Google Patents
Induced electron emission spectrometer using plural radiation sources
Info
Publication number
GB1359926A
GB1359926A
GB2205872A
GB2205872A
GB1359926A
GB 1359926 A
GB1359926 A
GB 1359926A
GB 2205872 A
GB2205872 A
GB 2205872A
GB 2205872 A
GB2205872 A
GB 2205872A
GB 1359926 A
GB1359926 A
GB 1359926A
Authority
GB
United Kingdom
Prior art keywords
electrons
anode
annuli
cathode
electron emission
Prior art date
1971-05-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2205872A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1971-05-17
Filing date
1972-05-11
Publication date
1974-07-17
1972-05-11
Application filed by Varian Associates Inc
filed
Critical
Varian Associates Inc
1974-07-17
Publication of GB1359926A
publication
Critical
patent/GB1359926A/en
Status
Expired
legal-status
Critical
Current
Links
Espacenet
Global Dossier
Discuss
Classifications
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J49/00—Particle spectrometers or separator tubes
H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
H01J49/46—Static spectrometers
H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
Abstract
1359926 Particle spectrometers VARIAN ASSOCIATES 11 May 1972 [17 May 1971] 22058/72 Heading H1D An induced electron emission spectrometer comprises a cathode 13 and an annular anode 12 arranged to be bombarded by electrons from the cathode producing X-rays for irradiating a sample 16 from which photo-electrons are emitted and analysed in a conventional analyser 17, 18, 19, 21, 22. In order to distinguish Auger electrons from photo-electrons the anode 12 is made of two materials, e.g. magnesium and aluminium either as two semiannular segments (23, 24), Fig. 2 (not shown), or two concentric annuli (27, 28), Fig. 3 (not shown), only one of the materials being used at a time, the Auger lines being distinguishable since they will be unshifted by a change in the anode material being used. In the case of semi-annular anode segments the cathode 13 is correspondingly divided into semi-annuli which are independently energizable. When concentric anode annuli are used the electrons are directed to the appropriate material by changing the potential on a focussing electrode 14.
GB2205872A
1971-05-17
1972-05-11
Induced electron emission spectrometer using plural radiation sources
Expired
GB1359926A
(en)
Applications Claiming Priority (1)
Application Number
Priority Date
Filing Date
Title
US14410671A
1971-05-17
1971-05-17
Publications (1)
Publication Number
Publication Date
GB1359926A
true
GB1359926A
(en)
1974-07-17
Family
ID=22507062
Family Applications (1)
Application Number
Title
Priority Date
Filing Date
GB2205872A
Expired
GB1359926A
(en)
1971-05-17
1972-05-11
Induced electron emission spectrometer using plural radiation sources
Country Status (5)
Country
Link
US
(1)
US3787692A
(en)
CA
(1)
CA961175A
(en)
DE
(1)
DE2223086A1
(en)
FR
(1)
FR2138013B1
(en)
GB
(1)
GB1359926A
(en)
Families Citing this family (7)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US3870882A
(en)
*
1973-05-23
1975-03-11
Gca Corp
Esca x-ray source
US4126782A
(en)
*
1976-02-09
1978-11-21
Hitachi, Ltd.
Electrostatic charged-particle analyzer
DE2743034C2
(en)
*
1977-09-24
1982-06-03
Leybold-Heraeus GmbH, 5000 Köln
Device for determining the energy of electrons
US4224518A
(en)
*
1978-12-21
1980-09-23
Varian Associates, Inc.
Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
US5444242A
(en)
*
1992-09-29
1995-08-22
Physical Electronics Inc.
Scanning and high resolution electron spectroscopy and imaging
DE10217513B4
(en)
*
2002-04-19
2004-06-17
Gesellschaft zur Förderung der Spektrochemie und angewandten Spektroskopie e.V.
Method and device for the analysis of hidden, near-surface layers by means of photoelectron spectrometry
US8774359B1
(en)
*
2010-07-30
2014-07-08
Kla-Tencor Corporation
Gate stack metrology
Family Cites Families (4)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US3114832A
(en)
*
1960-07-28
1963-12-17
Radiation Counter Lab Inc
X-ray spectroscopic system comprising plural sources, filters, fluorescent radiators, and comparative detectors
US3248543A
(en)
*
1963-04-18
1966-04-26
Arthur H Pitchford
X-ray spectrographic apparatus having a pair of X-ray tubes with different emission properties
US3461306A
(en)
*
1967-04-27
1969-08-12
Gen Electric
Electron probe microanalyzer for measuring the differential energy response of auger electrons
US3596091A
(en)
*
1969-05-19
1971-07-27
Varian Associates
Induced electron emission spectrometer having a unipotential sample chamber
1971
1971-05-17
US
US00144106A
patent/US3787692A/en
not_active
Expired – Lifetime
1972
1972-05-11
GB
GB2205872A
patent/GB1359926A/en
not_active
Expired
1972-05-12
DE
DE19722223086
patent/DE2223086A1/en
active
Pending
1972-05-16
CA
CA142,270A
patent/CA961175A/en
not_active
Expired
1972-05-17
FR
FR727217602A
patent/FR2138013B1/fr
not_active
Expired
Also Published As
Publication number
Publication date
FR2138013B1
(en)
1973-07-13
CA961175A
(en)
1975-01-14
FR2138013A1
(en)
1972-12-29
US3787692A
(en)
1974-01-22
DE2223086A1
(en)
1972-11-30
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Legal Events
Date
Code
Title
Description
1974-11-27
PS
Patent sealed [section 19, patents act 1949]
1976-12-08
PLNP
Patent lapsed through nonpayment of renewal fees
