GB2011656A – Method and means for correcting astigmatism in a scanning electron microscope or the like
– Google Patents
GB2011656A – Method and means for correcting astigmatism in a scanning electron microscope or the like
– Google Patents
Method and means for correcting astigmatism in a scanning electron microscope or the like
Info
Publication number
GB2011656A
GB2011656A
GB7850335A
GB7850335A
GB2011656A
GB 2011656 A
GB2011656 A
GB 2011656A
GB 7850335 A
GB7850335 A
GB 7850335A
GB 7850335 A
GB7850335 A
GB 7850335A
GB 2011656 A
GB2011656 A
GB 2011656A
Authority
GB
United Kingdom
Prior art keywords
electron microscope
scanning electron
correcting astigmatism
astigmatism
correcting
Prior art date
1977-12-29
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB7850335A
Other versions
GB2011656B
(en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1977-12-29
Filing date
1978-12-29
Publication date
1979-07-11
1978-12-29
Application filed by Jeol Ltd, Nihon Denshi KK
filed
Critical
Jeol Ltd
1979-07-11
Publication of GB2011656A
publication
Critical
patent/GB2011656A/en
1982-06-30
Application granted
granted
Critical
1982-06-30
Publication of GB2011656B
publication
Critical
patent/GB2011656B/en
Status
Expired
legal-status
Critical
Current
Links
Espacenet
Global Dossier
Discuss
Classifications
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
GB7850335A
1977-12-29
1978-12-29
Method and means for correcting astigmatism in a scanning electron microscope or the like
Expired
GB2011656B
(en)
Applications Claiming Priority (1)
Application Number
Priority Date
Filing Date
Title
JP15779077A
JPS5492050A
(en)
1977-12-29
1977-12-29
Method and apparatus for astigmatic correction of scanning electronic microscope and others
Publications (2)
Publication Number
Publication Date
GB2011656A
true
GB2011656A
(en)
1979-07-11
GB2011656B
GB2011656B
(en)
1982-06-30
Family
ID=15657340
Family Applications (1)
Application Number
Title
Priority Date
Filing Date
GB7850335A
Expired
GB2011656B
(en)
1977-12-29
1978-12-29
Method and means for correcting astigmatism in a scanning electron microscope or the like
Country Status (5)
Country
Link
US
(1)
US4214163A
(en)
JP
(1)
JPS5492050A
(en)
DE
(1)
DE2856688A1
(en)
FR
(1)
FR2413779A1
(en)
GB
(1)
GB2011656B
(en)
Cited By (3)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
FR2461353A1
(en)
*
1979-07-12
1981-01-30
Akashi Seisakusho Kk
METHOD AND DEVICE FOR CORRECTING ASTIGMATISM IN ELECTRONIC SCAN MICROSCOPES AND SIMILAR EQUIPMENT
EP0100634A2
(en)
*
1982-07-22
1984-02-15
Tadao Suganuma
Method and apparatus for handling a charged particle beam
EP0332140A2
(en)
*
1988-03-09
1989-09-13
Hitachi, Ltd.
Focusing apparatus of electron microscope
Families Citing this family (10)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
NL7906632A
(en)
*
1979-09-05
1981-03-09
Philips Nv
AUTOMATIC BUNDLE CORRECTION IN VOICE.
JPS56147350A
(en)
*
1980-04-16
1981-11-16
Nichidenshi Tekunikusu:Kk
Correction method and performing device of astigmatism
JPS60147117A
(en)
*
1984-01-10
1985-08-03
Fujitsu Ltd
Method for adjustment of electron beam device
JPS63119147A
(en)
*
1986-11-07
1988-05-23
Jeol Ltd
Focus condition detecting device of changed corpuscular beams
JPS63200444A
(en)
*
1987-02-16
1988-08-18
Jeol Ltd
Automatic astigmatism correction of scanning type electron microscope or the like
US5389858A
(en)
*
1992-07-16
1995-02-14
International Business Machines Corporation
Variable axis stigmator
US6180947B1
(en)
*
1998-08-07
2001-01-30
Nikon Corporation
Multi-element deflection aberration correction for electron beam lithography
WO2005074002A2
(en)
*
2004-01-29
2005-08-11
Applied Materials Israel, Ltd.
Focusing system and method for a charged particle imaging system
US8609979B2
(en)
2011-02-22
2013-12-17
Skysun, LLC
Electromagnetic radiation concentrating system
US9455115B2
(en)
*
2014-12-17
2016-09-27
Carl Zeiss Microscopy Gmbh
Method of adjusting a stigmator in a particle beam apparatus and a Particle beam system
Family Cites Families (8)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US3409799A
(en)
*
1966-08-29
1968-11-05
Ibm
Automatic focusing system for beam devices
DE1802450B1
(en)
*
1968-09-02
1970-07-02
Siemens Ag
Method for focusing a corpuscular optical image
GB1325540A
(en)
*
1969-10-10
1973-08-01
Texas Instruments Ltd
Electron beam apparatus
JPS5427703B2
(en)
*
1971-09-06
1979-09-11
US3748467A
(en)
*
1971-09-07
1973-07-24
Nibon Denshi K K
Scanning electron microscope
GB1463748A
(en)
*
1973-09-03
1977-02-09
Jeol Ltd
Electron beam apparatus
GB1477030A
(en)
*
1973-12-24
1977-06-22
Jeol Ltd
Method and apparatus for the automatic focussing of electron beams in electron optical apparatus
DE2542356C2
(en)
*
1975-09-19
1977-10-20
Siemens AG, 1000 Berlin und 8000 München
Method for focusing the objective lens of a corpuscular transmission scanning microscope and device for automatic implementation of the method, as well as application
1977
1977-12-29
JP
JP15779077A
patent/JPS5492050A/en
active
Granted
1978
1978-12-18
US
US05/970,860
patent/US4214163A/en
not_active
Expired – Lifetime
1978-12-28
FR
FR7836738A
patent/FR2413779A1/en
active
Granted
1978-12-29
DE
DE19782856688
patent/DE2856688A1/en
active
Granted
1978-12-29
GB
GB7850335A
patent/GB2011656B/en
not_active
Expired
Cited By (5)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
FR2461353A1
(en)
*
1979-07-12
1981-01-30
Akashi Seisakusho Kk
METHOD AND DEVICE FOR CORRECTING ASTIGMATISM IN ELECTRONIC SCAN MICROSCOPES AND SIMILAR EQUIPMENT
EP0100634A2
(en)
*
1982-07-22
1984-02-15
Tadao Suganuma
Method and apparatus for handling a charged particle beam
EP0100634A3
(en)
*
1982-07-22
1985-04-03
Tadao Suganuma
Method and apparatus for handling a charged particle beam
EP0332140A2
(en)
*
1988-03-09
1989-09-13
Hitachi, Ltd.
Focusing apparatus of electron microscope
EP0332140A3
(en)
*
1988-03-09
1990-06-20
Hitachi Ltd
Focusing apparatus of electron microscope
Also Published As
Publication number
Publication date
JPS6134221B2
(en)
1986-08-06
DE2856688A1
(en)
1979-07-05
FR2413779A1
(en)
1979-07-27
JPS5492050A
(en)
1979-07-20
GB2011656B
(en)
1982-06-30
FR2413779B1
(en)
1984-10-26
US4214163A
(en)
1980-07-22
DE2856688C2
(en)
1987-06-19
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Legal Events
Date
Code
Title
Description
1996-08-21
PCNP
Patent ceased through non-payment of renewal fee
Effective date:
19951229
