GB2015036B – Forming a pattern of material on a substrate
– Google Patents
GB2015036B – Forming a pattern of material on a substrate
– Google Patents
Forming a pattern of material on a substrate
Info
Publication number
GB2015036B
GB2015036B
GB7903579A
GB7903579A
GB2015036B
GB 2015036 B
GB2015036 B
GB 2015036B
GB 7903579 A
GB7903579 A
GB 7903579A
GB 7903579 A
GB7903579 A
GB 7903579A
GB 2015036 B
GB2015036 B
GB 2015036B
Authority
GB
United Kingdom
Prior art keywords
pattern
substrate
forming
Prior art date
1978-02-01
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7903579A
Other versions
GB2015036A
(en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Denshi KK
Hitachi Ltd
Original Assignee
Hitachi Denshi KK
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1978-02-01
Filing date
1979-02-01
Publication date
1982-06-09
1979-02-01
Application filed by Hitachi Denshi KK, Hitachi Ltd
filed
Critical
Hitachi Denshi KK
1979-09-05
Publication of GB2015036A
publication
Critical
patent/GB2015036A/en
1982-06-09
Application granted
granted
Critical
1982-06-09
Publication of GB2015036B
publication
Critical
patent/GB2015036B/en
Status
Expired
legal-status
Critical
Current
Links
Espacenet
Global Dossier
Discuss
Classifications
H—ELECTRICITY
H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
H05K3/00—Apparatus or processes for manufacturing printed circuits
H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
H05K3/143—Masks therefor
C—CHEMISTRY; METALLURGY
C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C23C14/04—Coating on selected surface areas, e.g. using masks
C23C14/042—Coating on selected surface areas, e.g. using masks using masks
GB7903579A
1978-02-01
1979-02-01
Forming a pattern of material on a substrate
Expired
GB2015036B
(en)
Applications Claiming Priority (1)
Application Number
Priority Date
Filing Date
Title
JP926378A
JPS54103552A
(en)
1978-02-01
1978-02-01
Pattern formation method
Publications (2)
Publication Number
Publication Date
GB2015036A
GB2015036A
(en)
1979-09-05
GB2015036B
true
GB2015036B
(en)
1982-06-09
Family
ID=11715536
Family Applications (1)
Application Number
Title
Priority Date
Filing Date
GB7903579A
Expired
GB2015036B
(en)
1978-02-01
1979-02-01
Forming a pattern of material on a substrate
Country Status (7)
Country
Link
US
(1)
US4273812A
(en)
JP
(1)
JPS54103552A
(en)
CA
(1)
CA1111144A
(en)
DE
(1)
DE2903872C2
(en)
FR
(1)
FR2416500B1
(en)
GB
(1)
GB2015036B
(en)
NL
(1)
NL7900828A
(en)
Families Citing this family (18)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US4418473A
(en)
*
1982-03-26
1983-12-06
International Business Machines Corp.
Method of making edge protected ferrite core
US4451344A
(en)
*
1982-03-26
1984-05-29
International Business Machines Corp.
Method of making edge protected ferrite core
US4511599A
(en)
*
1983-03-01
1985-04-16
Sigmatron Associates
Mask for vacuum depositing back metal electrodes on EL panel
US4536419A
(en)
*
1983-03-10
1985-08-20
Hitachi, Ltd.
Method for forming tapered films
US4574093A
(en)
*
1983-12-30
1986-03-04
At&T Bell Laboratories
Deposition technique
US4776868A
(en)
*
1985-09-09
1988-10-11
Corning Glass Works
Lenses and lens arrays
US4615781A
(en)
*
1985-10-23
1986-10-07
Gte Products Corporation
Mask assembly having mask stress relieving feature
US4746548A
(en)
*
1985-10-23
1988-05-24
Gte Products Corporation
Method for registration of shadow masked thin-film patterns
US4915057A
(en)
*
1985-10-23
1990-04-10
Gte Products Corporation
Apparatus and method for registration of shadow masked thin-film patterns
US4715940A
(en)
*
1985-10-23
1987-12-29
Gte Products Corporation
Mask for patterning electrode structures in thin film EL devices
US5003870A
(en)
*
1989-08-21
1991-04-02
Hughes Aircraft Company
Antistretch screen printing arrangement
US5389397A
(en)
*
1989-08-29
1995-02-14
North American Philips Corporation
Method for controlling the thickness distribution of a deposited layer
US5643629A
(en)
*
1991-05-20
1997-07-01
Sauerland; Franz L.
Method for adjusting center frequency and bandwidth of monolithic filters by plating through a single-aperture mask on a single side of the filters electrode pattern to plate selected areas of the pattern
US6469439B2
(en)
*
1999-06-15
2002-10-22
Toray Industries, Inc.
Process for producing an organic electroluminescent device
US6712943B2
(en)
*
2001-11-06
2004-03-30
The Boc Group, Inc.
Methods for angle limiting deposition mask
DE602006008850D1
(en)
*
2005-03-30
2009-10-15
Brother Ind Ltd
deposition mask
US8815013B2
(en)
*
2006-07-19
2014-08-26
Intermolecular, Inc.
Method and system for isolated and discretized process sequence integration
US11035033B2
(en)
*
2017-10-24
2021-06-15
Emagin Corporation
Direct-deposition system including standoffs for controlling substrate-mask separation
Family Cites Families (13)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US2676114A
(en)
*
1951-06-08
1954-04-20
Libbey Owens Ford Glass Co
Method of producing graded coatings
DE1446197A1
(en)
*
1959-04-27
1969-05-29
Licentia Gmbh
Screen to limit areas to be vaporized under reduced pressure
NL276676A
(en)
*
1961-04-13
US3193408A
(en)
*
1961-08-22
1965-07-06
David P Triller
Method for producing integrated circuitry components
NL294779A
(en)
*
1962-07-20
DE1272680B
(en)
*
1963-09-16
1968-07-11
Halbleiterwerk Frankfurt Oder
Device for vacuum vapor deposition of layers on a large number of documents covered with masks
US3326718A
(en)
*
1963-12-30
1967-06-20
Hughes Aircraft Co
Method for making an electrical capacitor
DE1521536A1
(en)
*
1965-12-21
1969-09-11
Telefunken Patent
Process for the production of several superimposed layers
US3510349A
(en)
*
1966-11-15
1970-05-05
Us Air Force
Vacuum deposited interconnection matrix
CH489620A
(en)
*
1967-10-02
1970-04-30
Stanniolfabrik Burgdorf Ag
Device for achieving sharply delimited non-metallized strips by vapor deposition in a high vacuum on a carrier web running around a cooling roller in a continuously operating vapor deposition system
US3799792A
(en)
*
1971-12-14
1974-03-26
Texas Instruments Inc
Vapor deposition method
DE2412398A1
(en)
*
1973-03-22
1974-10-17
Roparco Ltd
ROTARY LISTON ENGINE OR ROTARY LISTON COMPRESSOR
US4049857A
(en)
*
1976-07-28
1977-09-20
International Business Machines Corporation
Deposition mask and methods of making same
1978
1978-02-01
JP
JP926378A
patent/JPS54103552A/en
active
Granted
1979
1979-01-25
FR
FR7901901A
patent/FR2416500B1/en
not_active
Expired
1979-01-31
CA
CA320,564A
patent/CA1111144A/en
not_active
Expired
1979-02-01
GB
GB7903579A
patent/GB2015036B/en
not_active
Expired
1979-02-01
NL
NL7900828A
patent/NL7900828A/en
not_active
Application Discontinuation
1979-02-01
DE
DE2903872A
patent/DE2903872C2/en
not_active
Expired
1979-02-01
US
US06/008,587
patent/US4273812A/en
not_active
Expired – Lifetime
Also Published As
Publication number
Publication date
FR2416500B1
(en)
1986-12-26
FR2416500A1
(en)
1979-08-31
GB2015036A
(en)
1979-09-05
DE2903872A1
(en)
1979-08-02
DE2903872C2
(en)
1983-09-29
JPS54103552A
(en)
1979-08-15
CA1111144A
(en)
1981-10-20
JPS5625790B2
(en)
1981-06-15
NL7900828A
(en)
1979-08-03
US4273812A
(en)
1981-06-16
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Legal Events
Date
Code
Title
Description
1996-09-18
PCNP
Patent ceased through non-payment of renewal fee
Effective date:
19960201
