AU1471883A - Creación de Inventos y Patentes con Inteligencia Artificial

AU1471883A – Process for forming complementary integrated circuit devices
– Google Patents

AU1471883A – Process for forming complementary integrated circuit devices
– Google Patents
Process for forming complementary integrated circuit devices

Info

Publication number
AU1471883A

AU1471883A
AU14718/83A
AU1471883A
AU1471883A
AU 1471883 A
AU1471883 A
AU 1471883A
AU 14718/83 A
AU14718/83 A
AU 14718/83A
AU 1471883 A
AU1471883 A
AU 1471883A
AU 1471883 A
AU1471883 A
AU 1471883A
Authority
AU
Australia
Prior art keywords
integrated circuit
circuit devices
forming complementary
complementary integrated
forming
Prior art date
1982-04-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Application number
AU14718/83A
Other versions

AU543436B2
(en

Inventor
L.C. Parrillo
G.W. Reutlinger
L.K. Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

AT&T Corp

Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1982-04-05
Filing date
1983-03-17
Publication date
1983-11-04

1983-03-17
Application filed by Western Electric Co Inc
filed
Critical
Western Electric Co Inc

1983-11-04
Publication of AU1471883A
publication
Critical
patent/AU1471883A/en

1985-04-18
Application granted
granted
Critical

1985-04-18
Publication of AU543436B2
publication
Critical
patent/AU543436B2/en

2003-03-17
Anticipated expiration
legal-status
Critical

Status
Ceased
legal-status
Critical
Current

Links

Espacenet

Global Dossier

Discuss

230000000295
complement effect
Effects

0.000
title
1

Classifications

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer

H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials

H01L21/26—Bombardment with radiation

H01L21/263—Bombardment with radiation with high-energy radiation

H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation

H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors

H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate

H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier

H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body

H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/26—Bombardment with radiation

H01L21/263—Bombardment with radiation with high-energy radiation

H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation

H01L21/266—Bombardment with radiation with high-energy radiation producing ion implantation using masks

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof

H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate

H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components

H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology

H01L21/8232—Field-effect technology

H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type

H01L21/8238—Complementary field-effect transistors, e.g. CMOS

H01L21/823878—Complementary field-effect transistors, e.g. CMOS isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor

H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions

H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions

H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration

H01L29/0638—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layer, e.g. with channel stopper

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate

H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only

H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate

H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors

H01L27/0928—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors comprising both N- and P- wells in the substrate, e.g. twin-tub

AU14718/83A
1982-04-05
1983-03-17
Process for forming complementary integrated circuit devices

Ceased

AU543436B2
(en)

Applications Claiming Priority (2)

Application Number
Priority Date
Filing Date
Title

US365396

1982-04-05

US06/365,396

US4435895A
(en)

1982-04-05
1982-04-05
Process for forming complementary integrated circuit devices

Publications (2)

Publication Number
Publication Date

AU1471883A
true

AU1471883A
(en)

1983-11-04

AU543436B2

AU543436B2
(en)

1985-04-18

Family
ID=23438743
Family Applications (1)

Application Number
Title
Priority Date
Filing Date

AU14718/83A
Ceased

AU543436B2
(en)

1982-04-05
1983-03-17
Process for forming complementary integrated circuit devices

Country Status (11)

Country
Link

US
(1)

US4435895A
(en)

EP
(1)

EP0104233A4
(en)

JP
(1)

JPS59500540A
(en)

KR
(1)

KR840004830A
(en)

AU
(1)

AU543436B2
(en)

CA
(1)

CA1194612A
(en)

ES
(1)

ES521113A0
(en)

GB
(1)

GB2118364B
(en)

HK
(1)

HK80486A
(en)

IT
(1)

IT1168908B
(en)

WO
(1)

WO1983003709A1
(en)

Families Citing this family (64)

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Publication number
Priority date
Publication date
Assignee
Title

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(en)

1982-04-13
1986-03-11
Texas Instruments Incorporated
Differing field oxide thicknesses in dynamic memory device

JPS5955054A
(en)

1982-09-24
1984-03-29
Hitachi Ltd
Manufacture of semiconductor device

JPS5994861A
(en)

1982-11-24
1984-05-31
Hitachi Ltd
Semiconductor integrated circuit device

US4716451A
(en)

1982-12-10
1987-12-29
Rca Corporation
Semiconductor device with internal gettering region

DE3314450A1
(en)

1983-04-21
1984-10-25
Siemens AG, 1000 Berlin und 8000 München

METHOD FOR PRODUCING HIGHLY INTEGRATED COMPLEMENTARY MOS FIELD EFFECT TRANSISTOR CIRCUITS

US4574467A
(en)

1983-08-31
1986-03-11
Solid State Scientific, Inc.
N- well CMOS process on a P substrate with double field guard rings and a PMOS buried channel

JPS60106142A
(en)

1983-11-15
1985-06-11
Nec Corp
Manufacture of semiconductor element

JPS60123055A
(en)

1983-12-07
1985-07-01
Fujitsu Ltd
Semiconductor device and manufacture thereof

DE3477097D1
(en)

1984-03-21
1989-04-13
Siemens Ag
Method of producing a highly integrated circuit of mos field-effect transistors

US4516316A
(en)

1984-03-27
1985-05-14
Advanced Micro Devices, Inc.
Method of making improved twin wells for CMOS devices by controlling spatial separation

US4554726A
(en)

1984-04-17
1985-11-26
At&T Bell Laboratories
CMOS Integrated circuit technology utilizing dual implantation of slow and fast diffusing donor ions to form the n-well

US5008729A
(en)

1984-06-18
1991-04-16
Texas Instruments Incorporated
Laser programming of semiconductor devices using diode make-link structure

US4561170A
(en)

1984-07-02
1985-12-31
Texas Instruments Incorporated
Method of making field-plate isolated CMOS devices

US4558508A
(en)

1984-10-15
1985-12-17
International Business Machines Corporation
Process of making dual well CMOS semiconductor structure with aligned field-dopings using single masking step

JPS6197859A
(en)

1984-10-18
1986-05-16
Matsushita Electronics Corp
Manufacture of cmos ic

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(en)

1985-11-26
1989-09-12
Fuji Photo Film Co., Ltd.
Complementary insulated-gate field effect transistor integrated circuit and manufacturing method thereof

JPH0770606B2
(en)

1985-11-29
1995-07-31
株式会社日立製作所

Semiconductor device

IT1188309B
(en)

1986-01-24
1988-01-07
Sgs Microelettrica Spa

PROCEDURE FOR THE MANUFACTURE OF INTEGRATED ELECTRONIC DEVICES, IN PARTICULAR HIGH VOLTAGE P CHANNEL MOS TRANSISTORS

EP0260271A1
(en)

1986-03-04
1988-03-23
Motorola, Inc.
High/low doping profile for twin well process

US4929565A
(en)

1986-03-04
1990-05-29
Motorola, Inc.
High/low doping profile for twin well process

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(en)

1986-03-04
1989-12-26
Motorola, Inc.
High/low doping profile for twin well process

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(en)

1986-09-23
1988-01-05
Motorola Inc.
CMOS process

US4728619A
(en)

1987-06-19
1988-03-01
Motorola, Inc.
Field implant process for CMOS using germanium

US4780424A
(en)

1987-09-28
1988-10-25
Intel Corporation
Process for fabricating electrically alterable floating gate memory devices

US4925806A
(en)

1988-03-17
1990-05-15
Northern Telecom Limited
Method for making a doped well in a semiconductor substrate

KR940003218B1
(en)

1988-03-24
1994-04-16
세이꼬 엡슨 가부시끼가이샤
Forming trench in semiconductor substate with rounded corners

US5206535A
(en)

1988-03-24
1993-04-27
Seiko Epson Corporation
Semiconductor device structure

US5310690A
(en)

1988-10-31
1994-05-10
Texas Instruments Incorporated
Method for forming integrated circuits having buried doped regions

US4839301A
(en)

1988-12-19
1989-06-13
Micron Technology, Inc.
Blanket CMOS channel stop implant employing a combination of n-channel and p-channel punch-through implants

GB8907897D0
(en)

1989-04-07
1989-05-24
Inmos Ltd
Forming wells in semiconductor devices

US5091324A
(en)

1990-08-10
1992-02-25
Advanced Micro Devices, Inc.
Process for producing optimum intrinsic, long channel, and short channel mos devices in vlsi structures

US5132241A
(en)

1991-04-15
1992-07-21
Industrial Technology Research Institute
Method of manufacturing minimum counterdoping in twin well process

US5514616A
(en)

1991-08-26
1996-05-07
Lsi Logic Corporation
Depositing and densifying glass to planarize layers in semi-conductor devices based on CMOS structures

KR950005464B1
(en)

1992-02-25
1995-05-24
삼성전자주식회사
Semiconductor device and manufacturing method thereof

DE69333881T2
(en)

1992-07-31
2006-07-13
Hughes Electronics Corp., El Segundo

Integrated circuit safety system and method with implanted connections

US5358890A
(en)

1993-04-19
1994-10-25
Motorola Inc.
Process for fabricating isolation regions in a semiconductor device

US5472887A
(en)

1993-11-09
1995-12-05
Texas Instruments Incorporated
Method of fabricating semiconductor device having high-and low-voltage MOS transistors

US5434099A
(en)

1994-07-05
1995-07-18
United Microelectronics Corporation
Method of manufacturing field isolation for complimentary type devices

KR100193102B1
(en)

1994-08-25
1999-06-15
무명씨

Semiconductor device and manufacturing method thereof

US5622882A
(en)

1994-12-30
1997-04-22
Lsi Logic Corporation
Method of making a CMOS dynamic random-access memory (DRAM)

US5648290A
(en)

1994-12-30
1997-07-15
Lsi Logic Corporation
Method of making a CMOS dynamic random-access memory (DRAM)

US5679598A
(en)

1994-12-30
1997-10-21
Lsi Logic Corporation
Method of making a CMOS dynamic random-access memory (DRAM)

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(en)

1995-05-03
1996-11-12
Vanguard International Semiconductor Corporation
Method of forming self-aligned twin tub CMOS devices

KR100197656B1
(en)

1995-12-29
1999-07-01
김영환
Fabricating method of s.o.i. semiconductor device

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1995-09-22
1998-07-21
Hughes Electronics Corporation
Digital circuit with transistor geometry and channel stops providing camouflage against reverse engineering

US5783470A
(en)

1995-12-14
1998-07-21
Lsi Logic Corporation
Method of making CMOS dynamic random-access memory structures and the like

US5792680A
(en)

1996-11-25
1998-08-11
Vanguard International Semiconductor Corporation
Method of forming a low cost DRAM cell with self aligned twin tub CMOS devices and a pillar shaped capacitor

US5973375A
(en)

1997-06-06
1999-10-26
Hughes Electronics Corporation
Camouflaged circuit structure with step implants

US6396368B1
(en)

1999-11-10
2002-05-28
Hrl Laboratories, Llc
CMOS-compatible MEM switches and method of making

US7217977B2
(en)

2004-04-19
2007-05-15
Hrl Laboratories, Llc
Covert transformation of transistor properties as a circuit protection method

US6391700B1
(en)

2000-10-17
2002-05-21
United Microelectronics Corp.
Method for forming twin-well regions of semiconductor devices

US6815816B1
(en)

2000-10-25
2004-11-09
Hrl Laboratories, Llc
Implanted hidden interconnections in a semiconductor device for preventing reverse engineering

US6791191B2
(en)

2001-01-24
2004-09-14
Hrl Laboratories, Llc
Integrated circuits protected against reverse engineering and method for fabricating the same using vias without metal terminations

US7294935B2
(en)

2001-01-24
2007-11-13
Hrl Laboratories, Llc
Integrated circuits protected against reverse engineering and method for fabricating the same using an apparent metal contact line terminating on field oxide

US6348371B1
(en)

2001-03-19
2002-02-19
Taiwan Semiconductor Manufacturing Company
Method of forming self-aligned twin wells

US6774413B2
(en)

2001-06-15
2004-08-10
Hrl Laboratories, Llc
Integrated circuit structure with programmable connector/isolator

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(en)

2001-06-15
2004-05-25
Hrl Laboratories, Llc.
Permanently on transistor implemented using a double polysilicon layer CMOS process with buried contact

JP2003100862A
(en)

2001-09-21
2003-04-04
Mitsubishi Electric Corp
Semiconductor device and method of manufacturing the same

US6897535B2
(en)

2002-05-14
2005-05-24
Hrl Laboratories, Llc
Integrated circuit with reverse engineering protection

US7049667B2
(en)

2002-09-27
2006-05-23
Hrl Laboratories, Llc
Conductive channel pseudo block process and circuit to inhibit reverse engineering

US6979606B2
(en)

2002-11-22
2005-12-27
Hrl Laboratories, Llc
Use of silicon block process step to camouflage a false transistor

AU2003293540A1
(en)

2002-12-13
2004-07-09
Raytheon Company
Integrated circuit modification using well implants

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(en)

2004-06-29
2007-07-10
Hrl Laboratories, Llc
Symmetric non-intrusive and covert technique to render a transistor permanently non-operable

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(en)

2006-09-28
2012-05-01
Hrl Laboratories, Llc
Programmable connection and isolation of active regions in an integrated circuit using ambiguous features to confuse a reverse engineer

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1968-12-24
Ncr Co
p-n junction formation by thermal oxydation

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1971-07-28
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Method of making complementary monolithic insulated gate field effect transistors having low threshold voltage and low leakage current

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1972-11-01
1975-02-11
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Method of making a semi planar insulated gate field-effect transistor device with implanted field

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1975-05-08
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1976-01-12
1977-07-16
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1976-02-25
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High density CMOS process

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1976-04-28
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Mis-type semiconductor device

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1977-09-21
1979-01-23
Harris Corporation
Process for fabricating high voltage cmos with self-aligned guard rings utilizing selective diffusion and local oxidation

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1978-12-07
1980-07-29
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1987-05-05
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PROCESS FOR THE MANUFACTURE OF HIGH INTEGRATION COMPLEMENTARY MOS TRANSISTORS FOR HIGH VOLTAGES

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(en)

1980-03-24
1981-08-11
Intel Corporation
CMOS process

1982

1982-04-05
US
US06/365,396
patent/US4435895A/en
not_active
Expired – Lifetime

1983

1983-03-17
EP
EP19830901302
patent/EP0104233A4/en
not_active
Withdrawn

1983-03-17
WO
PCT/US1983/000369
patent/WO1983003709A1/en
not_active
Application Discontinuation

1983-03-17
JP
JP58501341A
patent/JPS59500540A/en
active
Pending

1983-03-17
AU
AU14718/83A
patent/AU543436B2/en
not_active
Ceased

1983-03-28
CA
CA000424672A
patent/CA1194612A/en
not_active
Expired

1983-03-29
ES
ES521113A
patent/ES521113A0/en
active
Granted

1983-03-31
GB
GB08309003A
patent/GB2118364B/en
not_active
Expired

1983-04-01
IT
IT20438/83A
patent/IT1168908B/en
active

1983-04-04
KR
KR1019830001400A
patent/KR840004830A/en
not_active
Application Discontinuation

1986

1986-10-23
HK
HK804/86A
patent/HK80486A/en
unknown

Also Published As

Publication number
Publication date

IT8320438A1
(en)

1984-10-01

ES8403665A1
(en)

1984-04-01

KR840004830A
(en)

1984-10-24

US4435895A
(en)

1984-03-13

AU543436B2
(en)

1985-04-18

EP0104233A4
(en)

1984-11-07

JPS59500540A
(en)

1984-03-29

GB2118364B
(en)

1985-11-06

IT8320438D0
(en)

1983-04-01

IT1168908B
(en)

1987-05-20

WO1983003709A1
(en)

1983-10-27

GB2118364A
(en)

1983-10-26

EP0104233A1
(en)

1984-04-04

CA1194612A
(en)

1985-10-01

ES521113A0
(en)

1984-04-01

HK80486A
(en)

1986-10-31

Información de contacto