AU1471883A – Process for forming complementary integrated circuit devices
– Google Patents
AU1471883A – Process for forming complementary integrated circuit devices
– Google Patents
Process for forming complementary integrated circuit devices
Info
Publication number
AU1471883A
AU1471883A
AU14718/83A
AU1471883A
AU1471883A
AU 1471883 A
AU1471883 A
AU 1471883A
AU 14718/83 A
AU14718/83 A
AU 14718/83A
AU 1471883 A
AU1471883 A
AU 1471883A
AU 1471883 A
AU1471883 A
AU 1471883A
Authority
AU
Australia
Prior art keywords
integrated circuit
circuit devices
forming complementary
complementary integrated
forming
Prior art date
1982-04-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU14718/83A
Other versions
AU543436B2
(en
Inventor
L.C. Parrillo
G.W. Reutlinger
L.K. Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1982-04-05
Filing date
1983-03-17
Publication date
1983-11-04
1983-03-17
Application filed by Western Electric Co Inc
filed
Critical
Western Electric Co Inc
1983-11-04
Publication of AU1471883A
publication
Critical
patent/AU1471883A/en
1985-04-18
Application granted
granted
Critical
1985-04-18
Publication of AU543436B2
publication
Critical
patent/AU543436B2/en
2003-03-17
Anticipated expiration
legal-status
Critical
Status
Ceased
legal-status
Critical
Current
Links
Espacenet
Global Dossier
Discuss
230000000295
complement effect
Effects
0.000
title
1
Classifications
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
H01L21/26—Bombardment with radiation
H01L21/263—Bombardment with radiation with high-energy radiation
H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
H01L21/26—Bombardment with radiation
H01L21/263—Bombardment with radiation with high-energy radiation
H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
H01L21/266—Bombardment with radiation with high-energy radiation producing ion implantation using masks
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
H01L21/8232—Field-effect technology
H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
H01L21/8238—Complementary field-effect transistors, e.g. CMOS
H01L21/823878—Complementary field-effect transistors, e.g. CMOS isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
H01L29/0638—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layer, e.g. with channel stopper
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
H01L27/0928—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors comprising both N- and P- wells in the substrate, e.g. twin-tub
AU14718/83A
1982-04-05
1983-03-17
Process for forming complementary integrated circuit devices
Ceased
AU543436B2
(en)
Applications Claiming Priority (2)
Application Number
Priority Date
Filing Date
Title
US365396
1982-04-05
US06/365,396
US4435895A
(en)
1982-04-05
1982-04-05
Process for forming complementary integrated circuit devices
Publications (2)
Publication Number
Publication Date
AU1471883A
true
AU1471883A
(en)
1983-11-04
AU543436B2
AU543436B2
(en)
1985-04-18
Family
ID=23438743
Family Applications (1)
Application Number
Title
Priority Date
Filing Date
AU14718/83A
Ceased
AU543436B2
(en)
1982-04-05
1983-03-17
Process for forming complementary integrated circuit devices
Country Status (11)
Country
Link
US
(1)
US4435895A
(en)
EP
(1)
EP0104233A4
(en)
JP
(1)
JPS59500540A
(en)
KR
(1)
KR840004830A
(en)
AU
(1)
AU543436B2
(en)
CA
(1)
CA1194612A
(en)
ES
(1)
ES521113A0
(en)
GB
(1)
GB2118364B
(en)
HK
(1)
HK80486A
(en)
IT
(1)
IT1168908B
(en)
WO
(1)
WO1983003709A1
(en)
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Semiconductor integrated circuit device
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Method of producing a highly integrated circuit of mos field-effect transistors
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Laser programming of semiconductor devices using diode make-link structure
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1984-07-02
1985-12-31
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Method of making field-plate isolated CMOS devices
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1984-10-15
1985-12-17
International Business Machines Corporation
Process of making dual well CMOS semiconductor structure with aligned field-dopings using single masking step
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1984-10-18
1986-05-16
Matsushita Electronics Corp
Manufacture of cmos ic
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1989-09-12
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Complementary insulated-gate field effect transistor integrated circuit and manufacturing method thereof
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1986-01-24
1988-01-07
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PROCEDURE FOR THE MANUFACTURE OF INTEGRATED ELECTRONIC DEVICES, IN PARTICULAR HIGH VOLTAGE P CHANNEL MOS TRANSISTORS
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1990-05-15
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Method for making a doped well in a semiconductor substrate
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Forming trench in semiconductor substate with rounded corners
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1993-04-27
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1994-05-10
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Method for forming integrated circuits having buried doped regions
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1996-05-07
Lsi Logic Corporation
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Motorola Inc.
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Texas Instruments Incorporated
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US06/365,396
patent/US4435895A/en
not_active
Expired – Lifetime
1983
1983-03-17
EP
EP19830901302
patent/EP0104233A4/en
not_active
Withdrawn
1983-03-17
WO
PCT/US1983/000369
patent/WO1983003709A1/en
not_active
Application Discontinuation
1983-03-17
JP
JP58501341A
patent/JPS59500540A/en
active
Pending
1983-03-17
AU
AU14718/83A
patent/AU543436B2/en
not_active
Ceased
1983-03-28
CA
CA000424672A
patent/CA1194612A/en
not_active
Expired
1983-03-29
ES
ES521113A
patent/ES521113A0/en
active
Granted
1983-03-31
GB
GB08309003A
patent/GB2118364B/en
not_active
Expired
1983-04-01
IT
IT20438/83A
patent/IT1168908B/en
active
1983-04-04
KR
KR1019830001400A
patent/KR840004830A/en
not_active
Application Discontinuation
1986
1986-10-23
HK
HK804/86A
patent/HK80486A/en
unknown
Also Published As
Publication number
Publication date
IT8320438A1
(en)
1984-10-01
ES8403665A1
(en)
1984-04-01
KR840004830A
(en)
1984-10-24
US4435895A
(en)
1984-03-13
AU543436B2
(en)
1985-04-18
EP0104233A4
(en)
1984-11-07
JPS59500540A
(en)
1984-03-29
GB2118364B
(en)
1985-11-06
IT8320438D0
(en)
1983-04-01
IT1168908B
(en)
1987-05-20
WO1983003709A1
(en)
1983-10-27
GB2118364A
(en)
1983-10-26
EP0104233A1
(en)
1984-04-04
CA1194612A
(en)
1985-10-01
ES521113A0
(en)
1984-04-01
HK80486A
(en)
1986-10-31
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