AU418470B2

AU418470B2 – Method for etching polyimide plastic film
– Google Patents

AU418470B2 – Method for etching polyimide plastic film
– Google Patents
Method for etching polyimide plastic film

Info

Publication number
AU418470B2

AU418470B2
AU24968/67A
AU2496867A
AU418470B2
AU 418470 B2
AU418470 B2
AU 418470B2
AU 24968/67 A
AU24968/67 A
AU 24968/67A
AU 2496867 A
AU2496867 A
AU 2496867A
AU 418470 B2
AU418470 B2
AU 418470B2
Authority
AU
Australia
Prior art keywords
plastic film
polyimide plastic
etching polyimide
etching
film
Prior art date
1964-12-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Application number
AU24968/67A
Other versions

AU2496867A
(en

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1964-12-08
Filing date
1967-07-24
Publication date
1971-11-02

1964-12-08
Priority to US416872A
priority
Critical
patent/US3395057A/en

1966-08-27
Priority to GB38524/66A
priority
patent/GB1160675A/en

1966-09-03
Priority to DESCH39489A
priority
patent/DE1293456B/en

1967-07-24
Application filed
filed
Critical

1967-07-24
Priority to AU24968/67A
priority
patent/AU418470B2/en

1967-09-15
Priority to FR121224A
priority
patent/FR1543501A/en

1969-01-30
Publication of AU2496867A
publication
Critical
patent/AU2496867A/en

1971-11-02
Application granted
granted
Critical

1971-11-02
Publication of AU418470B2
publication
Critical
patent/AU418470B2/en

Status
Expired
legal-status
Critical
Current

Links

Espacenet

Global Dossier

Discuss

Classifications

C—CHEMISTRY; METALLURGY

C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON

C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H

C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances

C08J7/12—Chemical modification

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES

H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties

H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances

H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes

H01B3/303—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups H01B3/38 or H01B3/302

H01B3/306—Polyimides or polyesterimides

H—ELECTRICITY

H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS

H05K1/00—Printed circuits

H05K1/02—Details

H05K1/03—Use of materials for the substrate

H05K1/0313—Organic insulating material

H05K1/032—Organic insulating material consisting of one material

H05K1/0346—Organic insulating material consisting of one material containing N

H—ELECTRICITY

H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS

H05K3/00—Apparatus or processes for manufacturing printed circuits

H05K3/0011—Working of insulating substrates or insulating layers

H05K3/0017—Etching of the substrate by chemical or physical means

H—ELECTRICITY

H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS

H05K3/00—Apparatus or processes for manufacturing printed circuits

H05K3/0011—Working of insulating substrates or insulating layers

H05K3/0017—Etching of the substrate by chemical or physical means

H05K3/002—Etching of the substrate by chemical or physical means by liquid chemical etching

C—CHEMISTRY; METALLURGY

C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON

C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H

C08J2379/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 – C08J2377/00

C08J2379/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors

C08J2379/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors

H—ELECTRICITY

H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS

H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00

H05K2201/01—Dielectrics

H05K2201/0137—Materials

H05K2201/0154—Polyimide

H—ELECTRICITY

H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS

H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00

H05K2203/05—Patterning and lithography; Masks; Details of resist

H05K2203/0548—Masks

H05K2203/0554—Metal used as mask for etching vias, e.g. by laser ablation

H—ELECTRICITY

H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS

H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00

H05K2203/07—Treatments involving liquids, e.g. plating, rinsing

H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved

H05K2203/0783—Using solvent, e.g. for cleaning; Regulating solvent content of pastes or coatings for adjusting the viscosity

AU24968/67A
1964-12-08
1967-07-24
Method for etching polyimide plastic film

Expired

AU418470B2
(en)

Priority Applications (5)

Application Number
Priority Date
Filing Date
Title

US416872A

US3395057A
(en)

1964-12-08
1964-12-08
Method for etching polyiminde plastic film

GB38524/66A

GB1160675A
(en)

1964-12-08
1966-08-27
Method for Etching Articles of Polymide

DESCH39489A

DE1293456B
(en)

1964-12-08
1966-09-03

PROCESS FOR AFTER TREATMENT OF AROMATIC POLYIMIDE FILMS OR SHAPED BODIES

AU24968/67A

AU418470B2
(en)

1964-12-08
1967-07-24
Method for etching polyimide plastic film

FR121224A

FR1543501A
(en)

1964-12-08
1967-09-15

Corrosion process of a polyimide plastic film

Applications Claiming Priority (5)

Application Number
Priority Date
Filing Date
Title

US416872A

US3395057A
(en)

1964-12-08
1964-12-08
Method for etching polyiminde plastic film

GB38524/66A

GB1160675A
(en)

1964-12-08
1966-08-27
Method for Etching Articles of Polymide

DESCH39489A

DE1293456B
(en)

1964-12-08
1966-09-03

PROCESS FOR AFTER TREATMENT OF AROMATIC POLYIMIDE FILMS OR SHAPED BODIES

AU24968/67A

AU418470B2
(en)

1964-12-08
1967-07-24
Method for etching polyimide plastic film

FR121224A

FR1543501A
(en)

1964-12-08
1967-09-15

Corrosion process of a polyimide plastic film

Publications (2)

Publication Number
Publication Date

AU2496867A

AU2496867A
(en)

1969-01-30

AU418470B2
true

AU418470B2
(en)

1971-11-02

Family
ID=27506706
Family Applications (1)

Application Number
Title
Priority Date
Filing Date

AU24968/67A
Expired

AU418470B2
(en)

1964-12-08
1967-07-24
Method for etching polyimide plastic film

Country Status (5)

Country
Link

US
(1)

US3395057A
(en)

AU
(1)

AU418470B2
(en)

DE
(1)

DE1293456B
(en)

FR
(1)

FR1543501A
(en)

GB
(1)

GB1160675A
(en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

US3791848A
(en)

*

1972-05-19
1974-02-12
Western Electric Co
A method of improving the adherence of a metal deposit to a polyimide surface

US3833436A
(en)

*

1972-09-05
1974-09-03
Buckbee Mears Co
Etching of polyimide films

US4218283A
(en)

*

1974-08-23
1980-08-19
Hitachi, Ltd.
Method for fabricating semiconductor device and etchant for polymer resin

US4113550A
(en)

*

1974-08-23
1978-09-12
Hitachi, Ltd.
Method for fabricating semiconductor device and etchant for polymer resin

US4307179A
(en)

*

1980-07-03
1981-12-22
International Business Machines Corporation
Planar metal interconnection system and process

US4472876A
(en)

*

1981-08-13
1984-09-25
Minnesota Mining And Manufacturing Company
Area-bonding tape

US5242713A
(en)

*

1988-12-23
1993-09-07
International Business Machines Corporation
Method for conditioning an organic polymeric material

EP0404049A3
(en)

*

1989-06-20
1992-04-15
Ube Industries, Ltd.
Process for etching polyimide resin

US5227008A
(en)

*

1992-01-23
1993-07-13
Minnesota Mining And Manufacturing Company
Method for making flexible circuits

US6218022B1
(en)

1996-09-20
2001-04-17
Toray Engineering Co., Ltd.
Resin etching solution and process for etching polyimide resins

US6177357B1
(en)

1999-04-30
2001-01-23
3M Innovative Properties Company
Method for making flexible circuits

Family Cites Families (2)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

NL107679C
(en)

*

1957-03-20

US3179634A
(en)

*

1962-01-26
1965-04-20
Du Pont
Aromatic polyimides and the process for preparing them

1964

1964-12-08
US
US416872A
patent/US3395057A/en
not_active
Expired – Lifetime

1966

1966-08-27
GB
GB38524/66A
patent/GB1160675A/en
not_active
Expired

1966-09-03
DE
DESCH39489A
patent/DE1293456B/en
active
Granted

1967

1967-07-24
AU
AU24968/67A
patent/AU418470B2/en
not_active
Expired

1967-09-15
FR
FR121224A
patent/FR1543501A/en
not_active
Expired

Also Published As

Publication number
Publication date

FR1543501A
(en)

1968-10-25

GB1160675A
(en)

1969-08-06

AU2496867A
(en)

1969-01-30

DE1293456B
(en)

1969-04-24

US3395057A
(en)

1968-07-30

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