GB1113686A – Improvements in or relating to tantalum thin film electrical components
– Google Patents
GB1113686A – Improvements in or relating to tantalum thin film electrical components
– Google Patents
Improvements in or relating to tantalum thin film electrical components
Info
Publication number
GB1113686A
GB1113686A
GB43267/64A
GB4326764A
GB1113686A
GB 1113686 A
GB1113686 A
GB 1113686A
GB 43267/64 A
GB43267/64 A
GB 43267/64A
GB 4326764 A
GB4326764 A
GB 4326764A
GB 1113686 A
GB1113686 A
GB 1113686A
Authority
GB
United Kingdom
Prior art keywords
tantalum
substrate
chromium
gold
mask
Prior art date
1964-10-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB43267/64A
Inventor
Richard Ernest Hobbs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1964-10-23
Filing date
1964-10-23
Publication date
1968-05-15
1964-10-23
Application filed by Associated Electrical Industries Ltd
filed
Critical
Associated Electrical Industries Ltd
1964-10-23
Priority to GB43267/64A
priority
Critical
patent/GB1113686A/en
1965-10-15
Priority to US496459A
priority
patent/US3377697A/en
1965-10-22
Priority to FR35932A
priority
patent/FR1451047A/en
1968-05-15
Publication of GB1113686A
publication
Critical
patent/GB1113686A/en
Status
Expired
legal-status
Critical
Current
Links
Espacenet
Global Dossier
Discuss
Classifications
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
H01G4/00—Fixed capacitors; Processes of their manufacture
H01G4/002—Details
H01G4/005—Electrodes
H01G4/008—Selection of materials
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01C—RESISTORS
H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01C—RESISTORS
H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
H01C17/288—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thin film techniques
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01C—RESISTORS
H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
H01C7/006—Thin film resistors
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
H01G2/00—Details of capacitors not covered by a single one of groups H01G4/00-H01G11/00
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T29/00—Metal working
Y10T29/49—Method of mechanical manufacture
Y10T29/49002—Electrical device making
Y10T29/49082—Resistor making
Y10T29/49099—Coating resistive material on a base
Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T29/00—Metal working
Y10T29/49—Method of mechanical manufacture
Y10T29/49002—Electrical device making
Y10T29/49082—Resistor making
Y10T29/49101—Applying terminal
Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T29/00—Metal working
Y10T29/49—Method of mechanical manufacture
Y10T29/49002—Electrical device making
Y10T29/49117—Conductor or circuit manufacturing
Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
Y10T29/49147—Assembling terminal to base
Abstract
An electrical component of the tantalum thin film type is equipped with terminating contacts by preparing contact areas on a substrate prior to deposition of the tantalum by sputtering or electron beam evaporation. Chromium is vapour deposited from two sources simultaneously through a molybdenum mask on to the heated substrate, then commencing before deposition of the chromium is complete, and continuing for some time after it finishes, gold is vapour deposited from a single source, and therefore over a smaller area than the chromium, through the same mask. Nickel is next vapour deposited through a mask in contact with the substrate on those parts of the gold film which will form the contacts and a tantalum layer between 500<\>rA and 4500<\>rA is vacuum deposited or sputtered on to the substrate and contact areas. A resistor track is formed on the tantalum by a photo-resist method and the nickel is dissolved in ferric chloride, the tantalum over-lying it being removed with it to expose the gold. The substrate may be glass, a ceramic, a metal with an oxide coating, or an oxide-coated semi-conductor.
GB43267/64A
1964-10-23
1964-10-23
Improvements in or relating to tantalum thin film electrical components
Expired
GB1113686A
(en)
Priority Applications (3)
Application Number
Priority Date
Filing Date
Title
GB43267/64A
GB1113686A
(en)
1964-10-23
1964-10-23
Improvements in or relating to tantalum thin film electrical components
US496459A
US3377697A
(en)
1964-10-23
1965-10-15
Method of terminating thin film components
FR35932A
FR1451047A
(en)
1964-10-23
1965-10-22
Improvements in tantalum thin film electrical components and their manufacturing process
Applications Claiming Priority (1)
Application Number
Priority Date
Filing Date
Title
GB43267/64A
GB1113686A
(en)
1964-10-23
1964-10-23
Improvements in or relating to tantalum thin film electrical components
Publications (1)
Publication Number
Publication Date
GB1113686A
true
GB1113686A
(en)
1968-05-15
Family
ID=10428009
Family Applications (1)
Application Number
Title
Priority Date
Filing Date
GB43267/64A
Expired
GB1113686A
(en)
1964-10-23
1964-10-23
Improvements in or relating to tantalum thin film electrical components
Country Status (2)
Country
Link
US
(1)
US3377697A
(en)
GB
(1)
GB1113686A
(en)
Cited By (1)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
GB2400751A
(en)
*
2003-04-14
2004-10-20
Agilent Technologies Inc
A thin film resistor device
Families Citing this family (12)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US3434940A
(en)
*
1966-07-21
1969-03-25
Mc Donnell Douglas Corp
Process for making thin-film temperature sensors
US3449828A
(en)
*
1966-09-28
1969-06-17
Control Data Corp
Method for producing circuit module
US3479257A
(en)
*
1966-11-25
1969-11-18
Gen Electric
Methods and apparatus for measuring the content of hydrogen or reducing gases in an atmosphere
US3621442A
(en)
*
1968-11-07
1971-11-16
Allen Bradley Co
Terminal connection of electronic devices
CH510873A
(en)
*
1969-07-08
1971-07-31
Mettler Instrumente Ag
Electric resistance thermometer
US3779804A
(en)
*
1970-12-30
1973-12-18
Nat Lead Co
Electrodes for ceramic bodies
US3721841A
(en)
*
1971-06-16
1973-03-20
Motorola Inc
Contact for piezoelectric crystals
US3896284A
(en)
*
1972-06-12
1975-07-22
Microsystems Int Ltd
Thin-film microelectronic resistors
US3886578A
(en)
*
1973-02-26
1975-05-27
Multi State Devices Ltd
Low ohmic resistance platinum contacts for vanadium oxide thin film devices
CA1081558A
(en)
*
1975-10-24
1980-07-15
Joseph D. Heaps
Method for dip-coating ceramic with molten silicon
US4278710A
(en)
*
1979-08-27
1981-07-14
The United States Of America As Represented By The Secretary Of The Navy
Apparatus and method for submicron pattern generation
EP2886360B1
(en)
2013-12-17
2016-07-20
Braun GmbH
Method of laser induced marking of an article
Family Cites Families (7)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US1857929A
(en)
*
1928-06-22
1932-05-10
Wadsworth Watch Case Co
Decorating and etching metals
US3253320A
(en)
*
1959-02-25
1966-05-31
Transitron Electronic Corp
Method of making semi-conductor devices with plated area
US3167451A
(en)
*
1959-08-26
1965-01-26
Sprague Electric Co
Method of resistor production
NL268538A
(en)
*
1960-08-29
US3296574A
(en)
*
1962-12-21
1967-01-03
Tassara Luigi
Film resistors with multilayer terminals
US3322655A
(en)
*
1963-08-12
1967-05-30
United Aircraft Corp
Method of making terminated microwafers
US3326718A
(en)
*
1963-12-30
1967-06-20
Hughes Aircraft Co
Method for making an electrical capacitor
1964
1964-10-23
GB
GB43267/64A
patent/GB1113686A/en
not_active
Expired
1965
1965-10-15
US
US496459A
patent/US3377697A/en
not_active
Expired – Lifetime
Cited By (2)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
GB2400751A
(en)
*
2003-04-14
2004-10-20
Agilent Technologies Inc
A thin film resistor device
GB2400751B
(en)
*
2003-04-14
2006-05-31
Agilent Technologies Inc
Thin-film resistor device
Also Published As
Publication number
Publication date
US3377697A
(en)
1968-04-16
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