GB1414390A – Lenses
– Google Patents
GB1414390A – Lenses
– Google Patents
Lenses
Info
Publication number
GB1414390A
GB1414390A
GB5990073A
GB5990073A
GB1414390A
GB 1414390 A
GB1414390 A
GB 1414390A
GB 5990073 A
GB5990073 A
GB 5990073A
GB 5990073 A
GB5990073 A
GB 5990073A
GB 1414390 A
GB1414390 A
GB 1414390A
Authority
GB
United Kingdom
Prior art keywords
lenses
dec
elements
cemented together
lens
Prior art date
1972-12-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5990073A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1972-12-26
Filing date
1973-12-27
Publication date
1975-11-19
1973-12-27
Application filed by Canon Inc
filed
Critical
Canon Inc
1975-11-19
Publication of GB1414390A
publication
Critical
patent/GB1414390A/en
Status
Expired
legal-status
Critical
Current
Links
Espacenet
Global Dossier
Discuss
Classifications
G—PHYSICS
G02—OPTICS
G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
G02B13/00—Optical objectives specially designed for the purposes specified below
G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
Abstract
1414390 Lenses CANON KK 27 Dec 1973 [26 Dec 1972] 59900/73 Heading G2J A lens system of high resolving power but a small reduction ratio (e.g. 0.5) for use in projection printing of a photomask on to a semi-conductor wafer in the manufacture of I.C.s comprises the eight lenses I-VIII shown. Elements Ia Ib may be cemented together and lens IV may comprise at least two elements cemented together. The parameters of the system must satisfy fifteen detailed inequalities. Data are given for three examples, in two of which a parallel sided glass plate IX is provided to prevent oxidation of the photo-resist of the negative type.
GB5990073A
1972-12-26
1973-12-27
Lenses
Expired
GB1414390A
(en)
Applications Claiming Priority (1)
Application Number
Priority Date
Filing Date
Title
JP73996A
JPS5336326B2
(en)
1972-12-26
1972-12-26
Publications (1)
Publication Number
Publication Date
GB1414390A
true
GB1414390A
(en)
1975-11-19
Family
ID=11489191
Family Applications (1)
Application Number
Title
Priority Date
Filing Date
GB5990073A
Expired
GB1414390A
(en)
1972-12-26
1973-12-27
Lenses
Country Status (3)
Country
Link
US
(1)
US3909115A
(en)
JP
(1)
JPS5336326B2
(en)
GB
(1)
GB1414390A
(en)
Families Citing this family (22)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
JPH0812329B2
(en)
*
1986-11-06
1996-02-07
株式会社シグマ
Projection lens
JPH09311278A
(en)
1996-05-20
1997-12-02
Nikon Corp
Reflection type dioptric system
JP3395801B2
(en)
1994-04-28
2003-04-14
株式会社ニコン
Catadioptric projection optical system, scanning projection exposure apparatus, and scanning projection exposure method
USRE38438E1
(en)
1994-08-23
2004-02-24
Nikon Corporation
Catadioptric reduction projection optical system and exposure apparatus having the same
JPH08179204A
(en)
1994-11-10
1996-07-12
Nikon Corp
Projection optical system and projection aligner
USRE38465E1
(en)
1994-12-14
2004-03-16
Nikon Corporation
Exposure apparatus
JP3500745B2
(en)
*
1994-12-14
2004-02-23
株式会社ニコン
Projection optical system, projection exposure apparatus, and projection exposure method
JP3454390B2
(en)
1995-01-06
2003-10-06
株式会社ニコン
Projection optical system, projection exposure apparatus, and projection exposure method
JP3819048B2
(en)
*
1995-03-15
2006-09-06
株式会社ニコン
Projection optical system, exposure apparatus including the same, and exposure method
JP3624973B2
(en)
*
1995-10-12
2005-03-02
株式会社ニコン
Projection optical system
JP3750123B2
(en)
*
1996-04-25
2006-03-01
株式会社ニコン
Projection optical system
US5808814A
(en)
*
1996-07-18
1998-09-15
Nikon Corporation
Short wavelength projection optical system
JP3610166B2
(en)
*
1996-07-31
2005-01-12
キヤノン株式会社
Large aperture wide angle telecentric lens
JP3864399B2
(en)
*
1996-08-08
2006-12-27
株式会社ニコン
Projection exposure apparatus, projection optical system used in the projection exposure apparatus, and device manufacturing method
US5852490A
(en)
*
1996-09-30
1998-12-22
Nikon Corporation
Projection exposure method and apparatus
JP3757536B2
(en)
*
1996-10-01
2006-03-22
株式会社ニコン
Projection optical system, exposure apparatus including the same, and device manufacturing method
JPH116957A
(en)
*
1997-04-25
1999-01-12
Nikon Corp
Projection optical system, projection exposure system and projection exposure method
JP3925576B2
(en)
1997-07-24
2007-06-06
株式会社ニコン
Projection optical system, exposure apparatus including the optical system, and device manufacturing method using the apparatus
JPH11214293A
(en)
1998-01-22
1999-08-06
Nikon Corp
Projection optical system and aligner therewith, and device manufacture
US6700645B1
(en)
1998-01-22
2004-03-02
Nikon Corporation
Projection optical system and exposure apparatus and method
JP2000039556A
(en)
*
1998-07-23
2000-02-08
Fuji Photo Optical Co Ltd
Projection lens
JP5712751B2
(en)
*
2011-04-11
2015-05-07
株式会社ニコン
OPTICAL SYSTEM, IMAGING DEVICE HAVING THE OPTICAL SYSTEM, AND OPTICAL SYSTEM MANUFACTURING METHOD
Family Cites Families (3)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US2771817A
(en)
*
1955-03-31
1956-11-27
Eastman Kodak Co
Seven-element gauss type objective comprising two negative meniscus components enclosed by two positive components
US3133983A
(en)
*
1962-06-27
1964-05-19
Bausch & Lomb
Symmetrical type of projection objective
US3524699A
(en)
*
1967-05-13
1970-08-18
Nippon Kogaku Kk
Symmetrical relay lens of equi-magnification
1972
1972-12-26
JP
JP73996A
patent/JPS5336326B2/ja
not_active
Expired
1973
1973-12-20
US
US426813A
patent/US3909115A/en
not_active
Expired – Lifetime
1973-12-27
GB
GB5990073A
patent/GB1414390A/en
not_active
Expired
Also Published As
Publication number
Publication date
DE2364054B2
(en)
1976-12-02
JPS4989527A
(en)
1974-08-27
JPS5336326B2
(en)
1978-10-02
US3909115A
(en)
1975-09-30
DE2364054A1
(en)
1974-06-27
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Projector
Legal Events
Date
Code
Title
Description
1976-03-31
PS
Patent sealed [section 19, patents act 1949]
1994-01-26
PE20
Patent expired after termination of 20 years
Effective date:
19931226
