GB1420803A – Electron microscopes
– Google Patents
GB1420803A – Electron microscopes
– Google Patents
Electron microscopes
Info
Publication number
GB1420803A
GB1420803A
GB3076473A
GB3076473A
GB1420803A
GB 1420803 A
GB1420803 A
GB 1420803A
GB 3076473 A
GB3076473 A
GB 3076473A
GB 3076473 A
GB3076473 A
GB 3076473A
GB 1420803 A
GB1420803 A
GB 1420803A
Authority
GB
United Kingdom
Prior art keywords
sample
condenser
june
detector
image
Prior art date
1973-06-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3076473A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1973-06-28
Filing date
1973-06-28
Publication date
1976-01-14
1973-06-28
Application filed by Associated Electrical Industries Ltd
filed
Critical
Associated Electrical Industries Ltd
1973-06-28
Priority to GB3076473A
priority
Critical
patent/GB1420803A/en
1974-06-26
Priority to DE2430696A
priority
patent/DE2430696A1/en
1974-06-26
Priority to US483126A
priority
patent/US3924126A/en
1974-06-26
Priority to NL7408601A
priority
patent/NL7408601A/xx
1974-06-27
Priority to JP49073741A
priority
patent/JPS5034462A/ja
1976-01-14
Publication of GB1420803A
publication
Critical
patent/GB1420803A/en
Status
Expired
legal-status
Critical
Current
Links
Espacenet
Global Dossier
Discuss
Classifications
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
H01J37/295—Electron or ion diffraction tubes
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
H01J37/10—Lenses
H01J37/14—Lenses magnetic
H01J37/141—Electromagnetic lenses
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/244—Detectors; Associated components or circuits therefor
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
H01J2237/245—Detection characterised by the variable being measured
H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
Abstract
1420803 Electron microscope lenses ASSOCIATED ELECTRICAL INDUSTRIES Ltd 26 June 1974 [28 June 1973] 30764/73 Heading H1D In a transmission electron microscope and X- ray probe analyser the electrons diverging from the image of the tungsten filament thermionic cathode formed by a first condenser lens (11, Fig. 1, not shown) enter from above and are focused on to a sample on support 33, forming an image of the filament source 100 nm in size, by means of the gap field in the upper part of combined second condenser and objective lens 12. Each part comprises a gapped iron magnetic circuit 23, 29 or 24, 30 having annular symmetry and surrounding an energizing winding 31 or 32, the currents being independently adjustable and the radial fields produced in dished iron plate 25 tending to cancel. The condenser component 23 holds four pairs of deflector coils 37 (only two shown) for adjustment of the beam position or for scanning. X-rays emitted by the electron irradiated area of the sample in holder 33 within the lower gap produce a signal from detector 38, its siting in direct line from the sample necessitating enlargement of hole 26. In an alternative embodiment hole 26 is reduced, the X-rays emerging through oblique holes 39 arranged symmetrically, one or more pointing at detector or detectors 38.
GB3076473A
1973-06-28
1973-06-28
Electron microscopes
Expired
GB1420803A
(en)
Priority Applications (5)
Application Number
Priority Date
Filing Date
Title
GB3076473A
GB1420803A
(en)
1973-06-28
1973-06-28
Electron microscopes
DE2430696A
DE2430696A1
(en)
1973-06-28
1974-06-26
ELECTRON MICROSCOPE
US483126A
US3924126A
(en)
1973-06-28
1974-06-26
Electron microscopes
NL7408601A
NL7408601A
(en)
1973-06-28
1974-06-26
JP49073741A
JPS5034462A
(en)
1973-06-28
1974-06-27
Applications Claiming Priority (1)
Application Number
Priority Date
Filing Date
Title
GB3076473A
GB1420803A
(en)
1973-06-28
1973-06-28
Electron microscopes
Publications (1)
Publication Number
Publication Date
GB1420803A
true
GB1420803A
(en)
1976-01-14
Family
ID=10312780
Family Applications (1)
Application Number
Title
Priority Date
Filing Date
GB3076473A
Expired
GB1420803A
(en)
1973-06-28
1973-06-28
Electron microscopes
Country Status (5)
Country
Link
US
(1)
US3924126A
(en)
JP
(1)
JPS5034462A
(en)
DE
(1)
DE2430696A1
(en)
GB
(1)
GB1420803A
(en)
NL
(1)
NL7408601A
(en)
Cited By (4)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
DE3201889A1
(en)
*
1981-01-30
1982-08-26
Naamloze Vennootschap Philips’ Gloeilampenfabrieken, 5621 Eindhoven
ELECTRON MICROSCOPE WITH X-RAY DETECTOR
GB2118361A
(en)
*
1982-03-19
1983-10-26
Int Precision Inc
Scanning electron beam apparatus
GB2161018A
(en)
*
1984-04-17
1986-01-02
Jeol Ltd
Electron microscope lenses
GB2238426A
(en)
*
1989-11-16
1991-05-29
Jeol Ltd
Electromagnetic lens.
Families Citing this family (14)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
DE2541915A1
(en)
*
1975-09-19
1977-03-31
Max Planck Gesellschaft
BODY RAY MICROSCOPE WITH RING ZONE SEGMENT IMAGE
GB1594465A
(en)
*
1977-03-23
1981-07-30
Nat Res Dev
Electron beam apparatus
US4475044A
(en)
*
1979-04-23
1984-10-02
Hitachi, Ltd.
Apparatus for focus-deflecting a charged particle beam
JPS57118357A
(en)
*
1981-01-14
1982-07-23
Jeol Ltd
Objective lens for scan type electron microscope
JP2582114B2
(en)
*
1988-04-01
1997-02-19
日本電子株式会社
X-ray analyzer for electron microscope
DE3825103A1
(en)
*
1988-07-23
1990-01-25
Zeiss Carl Fa
METHOD FOR ILLUMINATING AN OBJECT IN A TRANSMISSION ELECTRON MICROSCOPE
US5079428A
(en)
*
1989-08-31
1992-01-07
Bell Communications Research, Inc.
Electron microscope with an asymmetrical immersion lens
US4962306A
(en)
*
1989-12-04
1990-10-09
Intenational Business Machines Corporation
Magnetically filtered low loss scanning electron microscopy
EP2267751A3
(en)
*
2005-09-06
2011-01-05
Carl Zeiss SMT AG
Particle-optical component
TWI275118B
(en)
*
2005-12-09
2007-03-01
Li Bing Huan
Sample box of electron microscope for observing a general sample/live cell
US8080791B2
(en)
*
2008-12-12
2011-12-20
Fei Company
X-ray detector for electron microscope
US8314386B2
(en)
*
2010-03-26
2012-11-20
Uchicago Argonne, Llc
High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes
DE102010056321B9
(en)
*
2010-12-27
2018-03-22
Carl Zeiss Microscopy Gmbh
Particle beam microscope
US9520263B2
(en)
2013-02-11
2016-12-13
Novaray Medical Inc.
Method and apparatus for generation of a uniform-profile particle beam
Family Cites Families (5)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US2323328A
(en)
*
1940-10-31
1943-07-06
Rca Corp
Projection lens for electron microscopes
US2418349A
(en)
*
1945-12-13
1947-04-01
Rca Corp
Method of and means for correcting for distortion in electron lens systems
DE1614126B1
(en)
*
1967-02-27
1970-11-19
Max Planck Gesellschaft
Corpuscular beam microscope, in particular electron microscope, with a condenser lens formed by the front of an objective lens and a range diaphragm
US3514600A
(en)
*
1967-11-20
1970-05-26
Parke Davis & Co
Flexible conduit means for connecting an electron microscope to a vacuum pump
JPS5213713B2
(en)
*
1971-12-15
1977-04-16
1973
1973-06-28
GB
GB3076473A
patent/GB1420803A/en
not_active
Expired
1974
1974-06-26
NL
NL7408601A
patent/NL7408601A/xx
not_active
Application Discontinuation
1974-06-26
US
US483126A
patent/US3924126A/en
not_active
Expired – Lifetime
1974-06-26
DE
DE2430696A
patent/DE2430696A1/en
not_active
Withdrawn
1974-06-27
JP
JP49073741A
patent/JPS5034462A/ja
active
Pending
Cited By (7)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
DE3201889A1
(en)
*
1981-01-30
1982-08-26
Naamloze Vennootschap Philips’ Gloeilampenfabrieken, 5621 Eindhoven
ELECTRON MICROSCOPE WITH X-RAY DETECTOR
GB2118361A
(en)
*
1982-03-19
1983-10-26
Int Precision Inc
Scanning electron beam apparatus
GB2173945A
(en)
*
1982-03-19
1986-10-22
Int Precision Inc
Scanning electron beam apparatus
GB2161018A
(en)
*
1984-04-17
1986-01-02
Jeol Ltd
Electron microscope lenses
GB2161018B
(en)
*
1984-04-17
1989-06-01
Jeol Ltd
Transmission-type electron microscope
GB2238426A
(en)
*
1989-11-16
1991-05-29
Jeol Ltd
Electromagnetic lens.
GB2238426B
(en)
*
1989-11-16
1994-04-13
Jeol Ltd
Electromagnetic lens
Also Published As
Publication number
Publication date
US3924126A
(en)
1975-12-02
DE2430696A1
(en)
1975-01-16
JPS5034462A
(en)
1975-04-02
NL7408601A
(en)
1974-12-31
Similar Documents
Publication
Publication Date
Title
GB1420803A
(en)
1976-01-14
Electron microscopes
EP1150327B1
(en)
2018-02-14
Multi beam charged particle device
US4209702A
(en)
1980-06-24
Multiple electron lens
CA1110781A
(en)
1981-10-13
Electron microscope (comprising an auxiliary lens)
US3474245A
(en)
1969-10-21
Scanning electron microscope
EP0259907B1
(en)
1991-01-09
Electron detection with energy discrimination
US5008537A
(en)
1991-04-16
Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
US2257774A
(en)
1941-10-07
Electronic-optical device
GB1444109A
(en)
1976-07-28
Apparatus and method for generating x-rays
JPH07134964A
(en)
1995-05-23
Electron beam device provided with height measuring means for sample
EP1057203B1
(en)
2004-09-15
Particle-optical apparatus involving detection of auger electrons
US4705956A
(en)
1987-11-10
Electron image projector
US6646261B2
(en)
2003-11-11
SEM provided with a secondary electron detector having a central electrode
US3717761A
(en)
1973-02-20
Scanning electron microscope
US3857034A
(en)
1974-12-24
Scanning charged beam particle beam microscope
US2260041A
(en)
1941-10-21
Electron microscope
US6376839B1
(en)
2002-04-23
SEM for transmission operation with a location-sensitive detector
US4209701A
(en)
1980-06-24
Magnetic lens arrangement for corpuscular radiation equipment working under a vacuum
US3849647A
(en)
1974-11-19
Scanning electron microscope
US2348030A
(en)
1944-05-02
Scanning type of electron microscope
US4020387A
(en)
1977-04-26
Field emission electron gun
US6043489A
(en)
2000-03-28
Positron source
US3931519A
(en)
1976-01-06
Field emission electron gun
USRE29500E
(en)
1977-12-20
Scanning charged beam particle beam microscope
KR20000034984A
(en)
2000-06-26
Magnetic lens for focusing a charged particle beam
Legal Events
Date
Code
Title
Description
1976-05-26
PS
Patent sealed [section 19, patents act 1949]
1981-02-18
PCNP
Patent ceased through non-payment of renewal fee
