GB1067816A

GB1067816A – Improvements in or relating to lapping machines
– Google Patents

GB1067816A – Improvements in or relating to lapping machines
– Google Patents
Improvements in or relating to lapping machines

Info

Publication number
GB1067816A

GB1067816A
GB45882/65A
GB4588265A
GB1067816A
GB 1067816 A
GB1067816 A
GB 1067816A
GB 45882/65 A
GB45882/65 A
GB 45882/65A
GB 4588265 A
GB4588265 A
GB 4588265A
GB 1067816 A
GB1067816 A
GB 1067816A
Authority
GB
United Kingdom
Prior art keywords
members
lapping
ring
plate
secured
Prior art date
1964-12-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Application number
GB45882/65A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Speedlap Corp

Original Assignee
Speedlap Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1964-12-09
Filing date
1965-10-29
Publication date
1967-05-03

1965-10-29
Application filed by Speedlap Corp
filed
Critical
Speedlap Corp

1967-05-03
Publication of GB1067816A
publication
Critical
patent/GB1067816A/en

Status
Expired
legal-status
Critical
Current

Links

Espacenet

Global Dossier

Discuss

230000004048
modification
Effects

0.000
abstract
4

238000012986
modification
Methods

0.000
abstract
4

239000000463
material
Substances

0.000
abstract
2

229910052580
B4C
Inorganic materials

0.000
abstract
1

238000005299
abrasion
Methods

0.000
abstract
1

INAHAJYZKVIDIZ-UHFFFAOYSA-N
boron carbide
Chemical compound

B12B3B4C32B41
INAHAJYZKVIDIZ-UHFFFAOYSA-N
0.000
abstract
1

230000003750
conditioning effect
Effects

0.000
abstract
1

229920006333
epoxy cement
Polymers

0.000
abstract
1

239000000203
mixture
Substances

0.000
abstract
1

239000002245
particle
Substances

0.000
abstract
1

230000000717
retained effect
Effects

0.000
abstract
1

Classifications

B—PERFORMING OPERATIONS; TRANSPORTING

B24—GRINDING; POLISHING

B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS

B24B37/00—Lapping machines or devices; Accessories

B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces

B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool

B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping

B24B37/102—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool

Abstract

1,067,816. Lapping. SPEEDLAP CORPORATION. Oct. 29, 1965 [Dec. 9, 1964], No.45882/65. Heading B3D. A lapping machine comprises a lapping disc rotatable about a vertical axis, at least one truing and retaining ring member disposed on the lapping disc and arranged to retain workpieces thereon, a plate member disposed within the ring member and arranged to maintain pressure on the workpieces for holding them against the movement of the lapping disc when the machine is in operation and means carried by one of the members engageable with the other of the members for arresting downward movement of the plate member upon completion of a preselected amount of lapping. A lapping disc 14, Fig. 2, comprising segments 15 secured to a wheel 16 is rotated about a vertical axis; a freely flowing mixture of abrasive particles and an oil carrier is fed to the disc through discharge tubes. Workpieces 54 are retained within a lap conditioning ring 42 having in its bottom surface an annular recess in which pad members 52 are secured, e.g. by epoxy cement; the material of the pad members has a greater abrasion resistance than the material of the lapping disc, and is preferably boron carbide. A pressure plate 32 bears on the workpieces; it fits with slight clearance within the ring 42 and is connected to the lower end of the piston rod 28 of a pneumatic jack mounted on the machine frame. The plate 32 has secured thereto three posts 34 carrying adjustable screws 38, downward movement of the plate being arrested when the screws engage the top surface of the ring 42. In a modification, Fig. 4 (not shown), micrometers 60 are used instead of the screws 38. In a modification, Fig. 5 (not shown), an additional post 341 carries a dial indicator 68. In a modification, Fig. 7 (not shown) and Fig. 8 (not shown), the ring 72 has three circumferentially spaced series of radical cylindrical openings such as 78a-78f helically arranged. Corresponding openings of the three series are at the same height and spaced 120 degrees apart. A stop member 80 is disposed in one opening of each series and has an eccentric portion 82 projecting inwardly to limit the downward movement of the plate 32. For fine adjustment the stop members 80 are rotated by a wrench inserted in a socket 88 and the stop members are secured in adjusted position by a threaded tapered plug 90 which radially expands the stop members. Coarse adjustment is made by transferring the stop members 80 to another set of corresponding openings. In a modification, Fig. 10 (not shown), the ring 108 has three vertical slots 112 in which are slidable stop members 114 having fingers 116 engaging the plate 32. The members 114 are secured in adjusted position by bolts passing through slots in the members.

GB45882/65A
1964-12-09
1965-10-29
Improvements in or relating to lapping machines

Expired

GB1067816A
(en)

Applications Claiming Priority (1)

Application Number
Priority Date
Filing Date
Title

US416989A

US3375614A
(en)

1964-12-09
1964-12-09
Lapping machine truing ring and fixture

Publications (1)

Publication Number
Publication Date

GB1067816A
true

GB1067816A
(en)

1967-05-03

Family
ID=23652145
Family Applications (1)

Application Number
Title
Priority Date
Filing Date

GB45882/65A
Expired

GB1067816A
(en)

1964-12-09
1965-10-29
Improvements in or relating to lapping machines

Country Status (3)

Country
Link

US
(1)

US3375614A
(en)

CH
(1)

CH443044A
(en)

GB
(1)

GB1067816A
(en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

US3683562A
(en)

*

1970-09-24
1972-08-15
Spitfire Tool & Machine Co Inc
Means for applying a liquid abrasive over the surface of a rotatable lapping table of a lapping machine

US5695392A
(en)

*

1995-08-09
1997-12-09
Speedfam Corporation
Polishing device with improved handling of fluid polishing media

US6062963A
(en)

*

1997-12-01
2000-05-16
United Microelectronics Corp.
Retainer ring design for polishing head of chemical-mechanical polishing machine

US6241582B1
(en)

1997-09-01
2001-06-05
United Microelectronics Corp.
Chemical mechanical polish machines and fabrication process using the same

US6089961A
(en)

*

1998-12-07
2000-07-18
Speedfam-Ipec Corporation
Wafer polishing carrier and ring extension therefor

CN102744672B
(en)

*

2012-07-04
2014-05-07
昆山市达功电子厂
Crown type magnetic core grinding device

CN104924194B
(en)

*

2015-06-08
2017-03-08
中北大学
A kind of device thinning for crystal chemistry mechanical lapping and its using method

CN107498456A
(en)

*

2017-10-03
2017-12-22
德清晶生光电科技有限公司
Erratic star wheel available for one side polishing

CN112108949B
(en)

*

2020-09-10
2022-05-20
肇庆中彩机电技术研发有限公司
Precision bearing width grinding device and grinding method thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

DE1110544B
(en)

*

1957-11-29
1961-07-06
Siemens Ag

Single disc lapping machine for semiconductor wafers

US2971298A
(en)

*

1958-10-03
1961-02-14
Ibm
Workholder for a lapping machine

US2983086A
(en)

*

1959-04-30
1961-05-09
Pacific Semiconductors Inc
Flanged lapping jig

US3233370A
(en)

*

1963-07-19
1966-02-08
Falk
Production of parallel lapped surfaces

1964

1964-12-09
US
US416989A
patent/US3375614A/en
not_active
Expired – Lifetime

1965

1965-10-29
GB
GB45882/65A
patent/GB1067816A/en
not_active
Expired

1965-12-07
CH
CH1687465A
patent/CH443044A/en
unknown

Also Published As

Publication number
Publication date

US3375614A
(en)

1968-04-02

CH443044A
(en)

1967-08-31

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