GB1246443A – Improvements relating to manufacture of circuit elements
– Google Patents
GB1246443A – Improvements relating to manufacture of circuit elements
– Google Patents
Improvements relating to manufacture of circuit elements
Info
Publication number
GB1246443A
GB1246443A
GB38816/67A
GB3881667A
GB1246443A
GB 1246443 A
GB1246443 A
GB 1246443A
GB 38816/67 A
GB38816/67 A
GB 38816/67A
GB 3881667 A
GB3881667 A
GB 3881667A
GB 1246443 A
GB1246443 A
GB 1246443A
Authority
GB
United Kingdom
Prior art keywords
selected areas
laser
substrate
pulsed
aug
Prior art date
1967-08-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB38816/67A
Inventor
James Turner Law
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ferranti International PLC
Original Assignee
Ferranti PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1967-08-23
Filing date
1967-08-23
Publication date
1971-09-15
1967-08-23
Application filed by Ferranti PLC
filed
Critical
Ferranti PLC
1967-08-23
Priority to GB38816/67A
priority
Critical
patent/GB1246443A/en
1968-08-21
Priority to NL6811927A
priority
patent/NL6811927A/xx
1968-08-22
Priority to FR1581230D
priority
patent/FR1581230A/fr
1968-08-23
Priority to DE1765993A
priority
patent/DE1765993C3/en
1971-09-15
Publication of GB1246443A
publication
Critical
patent/GB1246443A/en
Status
Expired
legal-status
Critical
Current
Links
Espacenet
Global Dossier
Discuss
Classifications
B—PERFORMING OPERATIONS; TRANSPORTING
B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
B23K26/00—Working by laser beam, e.g. welding, cutting or boring
B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
B—PERFORMING OPERATIONS; TRANSPORTING
B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
B23K26/00—Working by laser beam, e.g. welding, cutting or boring
B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
B—PERFORMING OPERATIONS; TRANSPORTING
B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
B23K26/00—Working by laser beam, e.g. welding, cutting or boring
B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
B—PERFORMING OPERATIONS; TRANSPORTING
B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
B23K26/00—Working by laser beam, e.g. welding, cutting or boring
B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
C—CHEMISTRY; METALLURGY
C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C23C14/04—Coating on selected surface areas, e.g. using masks
C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
C—CHEMISTRY; METALLURGY
C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
C23C16/04—Coating on selected surface areas, e.g. using masks
C23C16/047—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
C—CHEMISTRY; METALLURGY
C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
Abstract
1,246,443. Lasers; resistors. FERRANTI Ltd. 15 Aug., 1968 [23 Aug., 1967], No. 38816/67. Headings H1C and H1S. [Also in Division C7] In a coating process wherein material is deposited from a gaseous atmosphere on to selected areas of a substrate, the said selected areas are irradiated using a laser, the duration and intensity of the irradiation being such that the temperature of these areas exclusively is high enough to cause deposition of a layer of material of the desired thickness. The laser may be a pulsed-output ruby laser emitting light in the I.R. or visible red region of the spectrum, and the selected areas are defined by using a phase- or amplitude-variable hologram. The process may be used for making thin-film carbon resistors. In the Figure, a chamber 12 has an alumina substrate placed on base 10, and following evacuation through pipe 15, benzene vapour is admitted through pipe 13, possibly together with diluent argon from 22. Radiation from pulsed-output ruby laser 17 and co-operating phase-variable hologram 18 passes through bloomed window 20 so that selected areas of surface 21 of the substrate are heated sufficiently to cause deposition of carbon thereon in narrow zig-zag configurations, which, after separation from each other with a scribing tool constitute thin-film resistive elements.
GB38816/67A
1967-08-23
1967-08-23
Improvements relating to manufacture of circuit elements
Expired
GB1246443A
(en)
Priority Applications (4)
Application Number
Priority Date
Filing Date
Title
GB38816/67A
GB1246443A
(en)
1967-08-23
1967-08-23
Improvements relating to manufacture of circuit elements
NL6811927A
NL6811927A
(en)
1967-08-23
1968-08-21
FR1581230D
FR1581230A
(en)
1967-08-23
1968-08-22
DE1765993A
DE1765993C3
(en)
1967-08-23
1968-08-23
Process for the manufacture of electrical circuit elements
Applications Claiming Priority (1)
Application Number
Priority Date
Filing Date
Title
GB38816/67A
GB1246443A
(en)
1967-08-23
1967-08-23
Improvements relating to manufacture of circuit elements
Publications (1)
Publication Number
Publication Date
GB1246443A
true
GB1246443A
(en)
1971-09-15
Family
ID=10405870
Family Applications (1)
Application Number
Title
Priority Date
Filing Date
GB38816/67A
Expired
GB1246443A
(en)
1967-08-23
1967-08-23
Improvements relating to manufacture of circuit elements
Country Status (4)
Country
Link
DE
(1)
DE1765993C3
(en)
FR
(1)
FR1581230A
(en)
GB
(1)
GB1246443A
(en)
NL
(1)
NL6811927A
(en)
1967
1967-08-23
GB
GB38816/67A
patent/GB1246443A/en
not_active
Expired
1968
1968-08-21
NL
NL6811927A
patent/NL6811927A/xx
unknown
1968-08-22
FR
FR1581230D
patent/FR1581230A/fr
not_active
Expired
1968-08-23
DE
DE1765993A
patent/DE1765993C3/en
not_active
Expired
Also Published As
Publication number
Publication date
NL6811927A
(en)
1969-02-25
DE1765993A1
(en)
1972-03-09
DE1765993C3
(en)
1975-05-22
FR1581230A
(en)
1969-09-12
DE1765993B2
(en)
1974-09-26
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