GB1331166A – Bearing arrangement for molecular pumps
– Google Patents
GB1331166A – Bearing arrangement for molecular pumps
– Google Patents
Bearing arrangement for molecular pumps
Info
Publication number
GB1331166A
GB1331166A
GB3293671A
GB3293671A
GB1331166A
GB 1331166 A
GB1331166 A
GB 1331166A
GB 3293671 A
GB3293671 A
GB 3293671A
GB 3293671 A
GB3293671 A
GB 3293671A
GB 1331166 A
GB1331166 A
GB 1331166A
Authority
GB
United Kingdom
Prior art keywords
oil
springs
bearings
housings
damping
Prior art date
1970-10-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3293671A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PFEIFFER VAKUUMTECHNIK
Original Assignee
PFEIFFER VAKUUMTECHNIK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1970-10-23
Filing date
1971-07-14
Publication date
1973-09-26
1971-07-14
Application filed by PFEIFFER VAKUUMTECHNIK
filed
Critical
PFEIFFER VAKUUMTECHNIK
1973-09-26
Publication of GB1331166A
publication
Critical
patent/GB1331166A/en
Status
Expired
legal-status
Critical
Current
Links
Espacenet
Global Dossier
Discuss
Classifications
F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04—POSITIVE – DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
F04D—NON-POSITIVE-DISPLACEMENT PUMPS
F04D29/00—Details, component parts, or accessories
F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
F04D29/056—Bearings
F04D29/059—Roller bearings
F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04—POSITIVE – DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
F04D—NON-POSITIVE-DISPLACEMENT PUMPS
F04D19/00—Axial-flow pumps
F04D19/02—Multi-stage pumps
F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D19/042—Turbomolecular vacuum pumps
F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04—POSITIVE – DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
F04D—NON-POSITIVE-DISPLACEMENT PUMPS
F04D25/00—Pumping installations or systems
F04D25/02—Units comprising pumps and their driving means
F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04—POSITIVE – DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
F04D—NON-POSITIVE-DISPLACEMENT PUMPS
F04D29/00—Details, component parts, or accessories
F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
F04D29/051—Axial thrust balancing
F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04—POSITIVE – DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
F04D—NON-POSITIVE-DISPLACEMENT PUMPS
F04D29/00—Details, component parts, or accessories
F04D29/06—Lubrication
F04D29/063—Lubrication specially adapted for elastic fluid pumps
F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04—POSITIVE – DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
F04D—NON-POSITIVE-DISPLACEMENT PUMPS
F04D29/00—Details, component parts, or accessories
F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
F16F1/00—Springs
F16F1/02—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
F16F1/025—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant characterised by having a particular shape
F16F1/027—Planar, e.g. in sheet form; leaf springs
F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
F16C2360/00—Engines or pumps
F16C2360/44—Centrifugal pumps
F16C2360/45—Turbo-molecular pumps
Abstract
1331166 Molecular pumps ARTHUR PFEIFFER VAKUUMTECHNIK GmbH 14 July 1971 [23 Oct 1970] 32936/71 Heading F1C [Also in Division F2] Bearings for a molecular pump are arranged in housings which are resiliently mounted in the radial direction, at least one housing being mounted movably in the axial direction. The vertical molecular pump shown in Fig. 2 comprises bearings 33, 34 carried by respective housings 35, 36 which are supported by respective pairs of springs 37, 38. Each spring comprises a disc of steel or brass, with a thick coating on both sides of a damping material such as indium, and split as shown in Fig.3 to provide less stiffness in the axial direction than in the radial direction. An upward bias is exerted by a spring 45 so that the upper bearing housing 36 rests against an abutment 39. Oil for lubrication and cooling is supplied to the bearings via flexible conduits 40, 42 made of material of high internal damping. Excess oil from the upper bearing is thrown off by a slinger ring 41 and passes via a duct 43 to a sump 44 which also receives oil dismissing from the lower bearing, the oil being returned from the sump to the oil pump. In another embodiment, Fig. 1 (not shown), having a horizontal shaft, the springs (15, 16) supporting the bearing housings may be plates or diaphragms rather than split discs. The springs may be damped by a coating, of a thickness substantially equal to that of the springs, of indium or lead. Instead, separate damping elements (21) of resilient synthetic material may be provided. Oil is supplied to the bearings through hoses, which may be corrugated, of synthetic material or metal of high damping characteristics.
GB3293671A
1970-10-23
1971-07-14
Bearing arrangement for molecular pumps
Expired
GB1331166A
(en)
Applications Claiming Priority (1)
Application Number
Priority Date
Filing Date
Title
DE19702052120
DE2052120A1
(en)
1970-10-23
1970-10-23
Bearing arrangement for molecular pumps and turbo molecular pumps
Publications (1)
Publication Number
Publication Date
GB1331166A
true
GB1331166A
(en)
1973-09-26
Family
ID=5785985
Family Applications (1)
Application Number
Title
Priority Date
Filing Date
GB3293671A
Expired
GB1331166A
(en)
1970-10-23
1971-07-14
Bearing arrangement for molecular pumps
Country Status (8)
Country
Link
US
(1)
US3759626A
(en)
BE
(1)
BE769933A
(en)
CA
(1)
CA943112A
(en)
CH
(1)
CH529928A
(en)
DE
(1)
DE2052120A1
(en)
FR
(1)
FR2109649A5
(en)
GB
(1)
GB1331166A
(en)
NL
(1)
NL7109105A
(en)
Cited By (10)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
FR2398920A1
(en)
*
1977-07-29
1979-02-23
Electrolux Ab
SOFT SUSPENSION BRACKET FOR BEARING
FR2405393A1
(en)
*
1977-10-05
1979-05-04
Babcock Ag
SHAFT BEARING SUPPORT
EP0196352A1
(en)
*
1985-04-04
1986-10-08
Leybold Aktiengesellschaft
Turbomolecular vacuum pump having a rotor and at least one roller bearing
EP0748940A1
(en)
*
1995-06-16
1996-12-18
Alcatel Cit
Turbo molecular pump
WO2008093134A1
(en)
*
2007-01-29
2008-08-07
Edwards Limited
Vacuum pump
EP2088327A1
(en)
*
2008-02-11
2009-08-12
VARIAN S.p.A.
Support for rolling bearing
WO2012004579A3
(en)
*
2010-07-08
2013-02-28
Edwards Limited
Pump
EP2800913A4
(en)
*
2012-01-03
2015-10-14
United Technologies Corp
Hybrid bearing turbomachine
CN107429703A
(en)
*
2015-02-09
2017-12-01
爱德华兹有限公司
Pumping lubricant feed system
GB2604878A
(en)
*
2021-03-15
2022-09-21
Edwards Ltd
Damper for a vacuum pump
Families Citing this family (25)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
DE2337226A1
(en)
*
1973-07-21
1975-02-06
Maschf Augsburg Nuernberg Ag
VACUUM PUMP WITH A RUNNER MOUNTED INSIDE THEIR HOUSING
US3969039A
(en)
*
1974-08-01
1976-07-13
American Optical Corporation
Vacuum pump
DE2654055B2
(en)
*
1976-11-29
1979-11-08
Kernforschungsanlage Juelich Gmbh, 5170 Juelich
Rotor and stator disks for turbo molecular pumps
NL184487C
(en)
*
1977-02-25
1989-08-01
Ultra Centrifuge Nederland Nv
MOLECULAR PUMP.
US4479756A
(en)
*
1978-08-21
1984-10-30
Roy E. Roth Company
Multi-stage pump
US4405286A
(en)
*
1982-01-21
1983-09-20
The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration
Actively suspended counter-rotating machine
DE3204750C2
(en)
*
1982-02-11
1984-04-26
Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar
Magnetically mounted turbo molecular pump
DE3239328C2
(en)
*
1982-10-23
1993-12-23
Pfeiffer Vakuumtechnik
Magnetically mounted turbomolecular pump with vibration damping
US5096386A
(en)
*
1989-11-17
1992-03-17
Sundstrand Corporation
Integral liquid ring and regenerative pump
EP0595410B1
(en)
*
1992-10-30
1996-08-21
Koninklijke Philips Electronics N.V.
Electric motor and apparatus comprising the electric motor
US5364194A
(en)
*
1993-01-04
1994-11-15
Ampex Systems Corporation
Axially displaced flexural bearing support
DE19634095A1
(en)
*
1996-08-23
1998-02-26
Pfeiffer Vacuum Gmbh
Entry stage for a double-flow gas friction pump
US6261052B1
(en)
*
1999-01-08
2001-07-17
Fantom Technologies Inc.
Prandtl layer turbine
NL1018212C2
(en)
†
2001-06-05
2002-12-10
Siemens Demag Delaval Turbomac
Compressor unit comprising a centrifugal compressor and an electric motor.
DE10211134C1
(en)
*
2002-03-14
2003-08-14
Schwerionenforsch Gmbh
Turbomolecular pump for low pressure applications has coaxial central opening providing free access to center
EP1533530B1
(en)
*
2003-11-18
2006-04-26
VARIAN S.p.A.
Vacuum pump provided with vibration damper
US20060225589A1
(en)
*
2005-04-07
2006-10-12
Johnson Robert P
Doctoring apparatus
DE102006037187A1
(en)
*
2006-08-09
2008-02-21
Pfeiffer Vacuum Gmbh
Arrangement for supporting a shaft of a vacuum pump
GB0618745D0
(en)
†
2006-09-22
2006-11-01
Boc Group Plc
Molecular drag pumping mechanism
DE202007012052U1
(en)
*
2007-08-29
2009-01-08
Oerlikon Leybold Vacuum Gmbh
Turbo molecular pump
DE102010021945A1
(en)
*
2010-05-28
2011-12-01
Pfeiffer Vacuum Gmbh
vacuum pump
CN106895029B
(en)
*
2016-11-29
2019-04-05
奇鋐科技股份有限公司
Shock-damping structure and its tandem fan
CN107588016A
(en)
*
2017-09-30
2018-01-16
南京创贝高速传动机械有限公司
A kind of DDR direct-drive high-speeds motor drives centrifugal compressor
GB2578431B
(en)
*
2018-10-25
2021-09-22
Edwards Ltd
Oil feed for a vacuum pump
CN112555177A
(en)
*
2021-01-05
2021-03-26
徐涛
Medical consumptive material vacuum packaging adsorbs uses high pressure positive blower
Family Cites Families (5)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US2523983A
(en)
*
1949-05-05
1950-09-26
Bryant Grinder Corp
High-speed rotor mounting
US2874008A
(en)
*
1956-02-23
1959-02-17
Skf Svenska Kullagerfab Ab
Bearing mounting for silent running rotating machine parts
DE1020930B
(en)
*
1958-11-13
1957-12-12
Siebtechnik G.m.b.H., Mülheim/Ruhr-Speldorf
Vibrating centrifuge
US3399827A
(en)
*
1967-05-19
1968-09-03
Everett H. Schwartzman
Vacuum pump system
US3494678A
(en)
*
1968-05-27
1970-02-10
David E Reznick
Vibration-damping bearing
1970
1970-10-23
DE
DE19702052120
patent/DE2052120A1/en
active
Pending
1971
1971-06-28
CH
CH947571A
patent/CH529928A/en
not_active
IP Right Cessation
1971-07-01
NL
NL7109105A
patent/NL7109105A/xx
unknown
1971-07-02
FR
FR7124198A
patent/FR2109649A5/fr
not_active
Expired
1971-07-13
BE
BE769933A
patent/BE769933A/en
unknown
1971-07-14
GB
GB3293671A
patent/GB1331166A/en
not_active
Expired
1971-10-22
US
US00191759A
patent/US3759626A/en
not_active
Expired – Lifetime
1971-10-22
CA
CA125,868A
patent/CA943112A/en
not_active
Expired
Cited By (23)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
FR2398920A1
(en)
*
1977-07-29
1979-02-23
Electrolux Ab
SOFT SUSPENSION BRACKET FOR BEARING
FR2405393A1
(en)
*
1977-10-05
1979-05-04
Babcock Ag
SHAFT BEARING SUPPORT
EP0196352A1
(en)
*
1985-04-04
1986-10-08
Leybold Aktiengesellschaft
Turbomolecular vacuum pump having a rotor and at least one roller bearing
EP0748940A1
(en)
*
1995-06-16
1996-12-18
Alcatel Cit
Turbo molecular pump
FR2735535A1
(en)
*
1995-06-16
1996-12-20
Cit Alcatel
TURBOMOLECULAR PUMP
US5895202A
(en)
*
1995-06-16
1999-04-20
Alcatel Cit
Molecular drag pump
WO2008093134A1
(en)
*
2007-01-29
2008-08-07
Edwards Limited
Vacuum pump
US9759256B2
(en)
2007-01-29
2017-09-12
Edwards Limited
Vacuum pump
EP2088327A1
(en)
*
2008-02-11
2009-08-12
VARIAN S.p.A.
Support for rolling bearing
US8360754B2
(en)
2008-02-11
2013-01-29
Agilent Technologies, Inc.
Support for rolling bearing
JP2013531763A
(en)
*
2010-07-08
2013-08-08
エドワーズ リミテッド
pump
CN103270248A
(en)
*
2010-07-08
2013-08-28
爱德华兹有限公司
Pump
CN103270248B
(en)
*
2010-07-08
2016-08-10
爱德华兹有限公司
Pump
GB2481839B
(en)
*
2010-07-08
2017-03-22
Edwards Ltd
An axially flexible pump bearing carrier
US9631630B2
(en)
2010-07-08
2017-04-25
Edwards Limited
Bearing carrier for a pump
TWI586898B
(en)
*
2010-07-08
2017-06-11
愛德華有限公司
Pump
WO2012004579A3
(en)
*
2010-07-08
2013-02-28
Edwards Limited
Pump
EP2800913A4
(en)
*
2012-01-03
2015-10-14
United Technologies Corp
Hybrid bearing turbomachine
US9234522B2
(en)
2012-01-03
2016-01-12
United Technologies Corporation
Hybrid bearing turbomachine
CN107429703A
(en)
*
2015-02-09
2017-12-01
爱德华兹有限公司
Pumping lubricant feed system
US10400777B2
(en)
2015-02-09
2019-09-03
Edwards Limited
Pump lubricant supply systems
GB2604878A
(en)
*
2021-03-15
2022-09-21
Edwards Ltd
Damper for a vacuum pump
WO2022195251A1
(en)
*
2021-03-15
2022-09-22
Edwards Limited
Rotor bearing damper for a vacuum pump
Also Published As
Publication number
Publication date
FR2109649A5
(en)
1972-05-26
DE2052120A1
(en)
1972-04-27
BE769933A
(en)
1971-11-16
NL7109105A
(en)
1972-04-25
CH529928A
(en)
1972-10-31
US3759626A
(en)
1973-09-18
CA943112A
(en)
1974-03-05
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Legal Events
Date
Code
Title
Description
1974-02-06
PS
Patent sealed [section 19, patents act 1949]
1976-02-11
PLNP
Patent lapsed through nonpayment of renewal fees
