GB1352538A – Broadband high efficiency thin film piezoelectric transducers
– Google Patents
GB1352538A – Broadband high efficiency thin film piezoelectric transducers
– Google Patents
Broadband high efficiency thin film piezoelectric transducers
Info
Publication number
GB1352538A
GB1352538A
GB4047671A
GB4047671A
GB1352538A
GB 1352538 A
GB1352538 A
GB 1352538A
GB 4047671 A
GB4047671 A
GB 4047671A
GB 4047671 A
GB4047671 A
GB 4047671A
GB 1352538 A
GB1352538 A
GB 1352538A
Authority
GB
United Kingdom
Prior art keywords
thin film
electrodes
deposited
layer
transducer
Prior art date
1970-09-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4047671A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1970-09-10
Filing date
1971-08-31
Publication date
1974-05-08
1971-08-31
Application filed by Westinghouse Electric Corp
filed
Critical
Westinghouse Electric Corp
1974-05-08
Publication of GB1352538A
publication
Critical
patent/GB1352538A/en
Status
Expired
legal-status
Critical
Current
Links
Espacenet
Global Dossier
Discuss
Classifications
H—ELECTRICITY
H03—ELECTRONIC CIRCUITRY
H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
H03H9/0004—Impedance-matching networks
H—ELECTRICITY
H03—ELECTRONIC CIRCUITRY
H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
H03H9/02—Details
H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
Abstract
1352538 Piezoelectric thin film transducers WESTINGHOUSE ELECTRIC CORP 31 Aug 1971 [10 Sept 1970] 40476/71 Heading H3U A microwave piezoelectric thin film transducer mounted on acoustic delay line material 10, Figs. 1, 3 and intended for direct connection to a transmission line without external impedance matching comprises a cadmium sulphide piezoelectric film 12 with a thinner dielectric silicon monoxide layer 13, sandwiched by electrodes 14, 16 with portions projecting beyond the boundaries of film 12, and interconnected via projections 16B, such that each pair of mutually opposed pairs of fingers 14A, 16A operate as a transducer element, adjacent elements being connected in series having the same polarization sense, Fig. 2 (not shown). Input impedance is thus raised, input capacitance being reduced. The layer 12 is vapour deposited, and may be homogeneous, or stratified, the strata having alternating polarities, and different tuned frequencies to achieve stagger tuning of the transducer. Manufacture.-The electrodes, of gold on chromium or gold on lithium niobate on chromium are vapour deposited, the electrodes adjacent the substrate 10 being deposited before the piezo layer 12, deposited via an apertured mask or by a subtractive method.
GB4047671A
1970-09-10
1971-08-31
Broadband high efficiency thin film piezoelectric transducers
Expired
GB1352538A
(en)
Applications Claiming Priority (1)
Application Number
Priority Date
Filing Date
Title
US7109470A
1970-09-10
1970-09-10
Publications (1)
Publication Number
Publication Date
GB1352538A
true
GB1352538A
(en)
1974-05-08
Family
ID=22099214
Family Applications (1)
Application Number
Title
Priority Date
Filing Date
GB4047671A
Expired
GB1352538A
(en)
1970-09-10
1971-08-31
Broadband high efficiency thin film piezoelectric transducers
Country Status (3)
Country
Link
US
(1)
US3689784A
(en)
DE
(1)
DE2144607C3
(en)
GB
(1)
GB1352538A
(en)
Families Citing this family (19)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US3760299A
(en)
*
1971-08-09
1973-09-18
Hazeltine Corp
Acoustic surface wave-apparatus having dielectric material separating transducer from acoustic medium
US3825779A
(en)
*
1973-03-30
1974-07-23
Westinghouse Electric Corp
Interdigital mosaic thin film shear transducer
JPS5434519B2
(en)
*
1973-08-31
1979-10-27
DE2607837C2
(en)
*
1975-03-04
1984-09-13
Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto
Multi-layer interdigital transducer for surface acoustic waves
GB1512593A
(en)
*
1975-03-13
1978-06-01
Murata Manufacturing Co
Elastic surface wave filter
US4035675A
(en)
*
1976-04-08
1977-07-12
University Of Illinois Foundation
Capacitive tap weighted surface acoustic wave transducers
US4259649A
(en)
*
1979-07-26
1981-03-31
Westinghouse Electric Corp.
Electroacoustic delay line apparatus
US4292608A
(en)
*
1979-07-26
1981-09-29
Westinghouse Electric Corp.
Electroacoustic delay line apparatus
US4482833A
(en)
*
1981-04-01
1984-11-13
Westinghouse Electric Corp.
Method for obtaining oriented gold and piezoelectric films
US4480209A
(en)
*
1981-10-09
1984-10-30
Clarion Co., Ltd.
Surface acoustic wave device having a specified crystalline orientation
US4629927A
(en)
*
1982-05-20
1986-12-16
Samodovitz Arthur J
Acoustical wave aimer
GB2123638B
(en)
*
1982-06-22
1986-02-26
Clarion Co Ltd
Surface acoustic wave device
WO1995002279A1
(en)
*
1993-07-06
1995-01-19
Motorola, Inc.
Surface acoustic wave device
US5486800A
(en)
*
1994-09-29
1996-01-23
Motorola, Inc.
Surface acoustic wave device
US5499003A
(en)
*
1994-10-03
1996-03-12
Motorola, Inc.
Differential saw filter including series coupled resonant/antiresonant tracks
JP3412611B2
(en)
*
2000-09-25
2003-06-03
株式会社村田製作所
Surface acoustic wave device
JP3780415B2
(en)
*
2001-06-12
2006-05-31
株式会社村田製作所
Longitudinal coupled resonator type surface acoustic wave filter and communication device using the same
US9473106B2
(en)
2011-06-21
2016-10-18
Georgia Tech Research Corporation
Thin-film bulk acoustic wave delay line
FR3033087B1
(en)
*
2015-02-23
2018-03-23
Commissariat A L’energie Atomique Et Aux Energies Alternatives
PIEZOELECTRIC DEVICE
Family Cites Families (10)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
NL253866A
(en)
*
1959-07-17
NL261168A
(en)
*
1960-03-07
US3401360A
(en)
*
1963-07-19
1968-09-10
Bell Telephone Labor Inc
Phased transducer arrays for elastic wave transmission
US3360749A
(en)
*
1964-12-09
1967-12-26
Bell Telephone Labor Inc
Elastic wave delay device
US3401275A
(en)
*
1966-04-14
1968-09-10
Clevite Corp
Composite resonator
US3453711A
(en)
*
1966-08-24
1969-07-08
Corning Glass Works
Method of connecting together a plurality of transducer segments
US3490055A
(en)
*
1967-01-16
1970-01-13
Microtek Electronics Inc
Circuit structure with capacitor
US3587005A
(en)
*
1968-01-03
1971-06-22
Bell Telephone Labor Inc
Transducer array for elastic wave transmission
US3505542A
(en)
*
1968-02-28
1970-04-07
Westinghouse Electric Corp
Surface wave piezoelectric resonator
US3593214A
(en)
*
1969-04-29
1971-07-13
Westinghouse Electric Corp
High impedance transducer
1970
1970-09-10
US
US71094A
patent/US3689784A/en
not_active
Expired – Lifetime
1971
1971-08-31
GB
GB4047671A
patent/GB1352538A/en
not_active
Expired
1971-09-07
DE
DE2144607A
patent/DE2144607C3/en
not_active
Expired
Also Published As
Publication number
Publication date
DE2144607C3
(en)
1980-11-06
DE2144607A1
(en)
1972-03-16
DE2144607B2
(en)
1980-01-03
US3689784A
(en)
1972-09-05
Similar Documents
Publication
Publication Date
Title
GB1352538A
(en)
1974-05-08
Broadband high efficiency thin film piezoelectric transducers
US3479572A
(en)
1969-11-18
Acoustic surface wave device
US2540194A
(en)
1951-02-06
Piezoelectric transducer and method for producing same
US3688223A
(en)
1972-08-29
Electromechanical filters comprising input-output interdigital electrodes having differing amplitude and frequency characteristics
GB1450820A
(en)
1976-09-29
Acoustic surface wave device
GB1332141A
(en)
1973-10-03
Piezoelectric resonator circuit component
GB1513911A
(en)
1978-06-14
Acoustic surface wave resonator devices
US4401956A
(en)
1983-08-30
Electronically variable time delay in piezoelectric media
US3663899A
(en)
1972-05-16
Surface-wave electro-acoustic filter
GB752040A
(en)
1956-07-04
Piezoelectric transducer
GB1430725A
(en)
1976-04-07
Acoustic surface wave devices
GB2086167A
(en)
1982-05-06
Carrier concentration controlled surface acoustic wave resonator
US3686518A
(en)
1972-08-22
Unidirectional surface wave transducers
GB1341547A
(en)
1973-12-25
GB1369884A
(en)
1974-10-09
Acoustic surface wave apparatus
GB1396997A
(en)
1975-06-11
Electromechanical transducdrs and surface wave electrical filters
GB1362238A
(en)
1974-07-30
Acoustic surface wave devices
US3686579A
(en)
1972-08-22
Solid-state, acoustic-wave amplifiers
JPS5834049B2
(en)
1983-07-23
surface acoustic wave device
US4348650A
(en)
1982-09-07
Surface-acoustic-wave parametric device
GB907010A
(en)
1962-09-26
Piezoelectric resonators
GB1490883A
(en)
1977-11-02
Acoustic surface wave transducers and devices
GB1381177A
(en)
1975-01-22
Piezoelectric resonators
US4636678A
(en)
1987-01-13
Compensation of acoustic wave devices
JPS529389A
(en)
1977-01-24
Surface acoustic wave device
Legal Events
Date
Code
Title
Description
1974-09-18
PS
Patent sealed [section 19, patents act 1949]
1984-05-02
PCNP
Patent ceased through non-payment of renewal fee
