GB1438414A – Positioning apparatus
– Google Patents
GB1438414A – Positioning apparatus
– Google Patents
Positioning apparatus
Info
Publication number
GB1438414A
GB1438414A
GB3649774A
GB3649774A
GB1438414A
GB 1438414 A
GB1438414 A
GB 1438414A
GB 3649774 A
GB3649774 A
GB 3649774A
GB 3649774 A
GB3649774 A
GB 3649774A
GB 1438414 A
GB1438414 A
GB 1438414A
Authority
GB
United Kingdom
Prior art keywords
workpiece
control
stage
motors
desired position
Prior art date
1973-09-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3649774A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1973-09-10
Filing date
1974-08-20
Publication date
1976-06-09
1973-09-10
Priority claimed from US395890A
external-priority
patent/US3904945A/en
1973-09-10
Priority claimed from US395502A
external-priority
patent/US3886421A/en
1974-08-20
Application filed by International Business Machines Corp
filed
Critical
International Business Machines Corp
1976-06-09
Publication of GB1438414A
publication
Critical
patent/GB1438414A/en
Status
Expired
legal-status
Critical
Current
Links
Espacenet
Global Dossier
Discuss
238000010894
electron beam technology
Methods
0.000
abstract
1
239000004065
semiconductor
Substances
0.000
abstract
1
Classifications
G—PHYSICS
G05—CONTROLLING; REGULATING
G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B19/00—Programme-control systems
G05B19/02—Programme-control systems electric
G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
G05B19/39—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using a combination of the means covered by at least two of the preceding sub-groups G05B19/21, G05B19/27, and G05B19/33
B—PERFORMING OPERATIONS; TRANSPORTING
B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
B23Q1/25—Movable or adjustable work or tool supports
B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
B23Q1/36—Springs
G—PHYSICS
G05—CONTROLLING; REGULATING
G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00—Program-control systems
G05B2219/30—Nc systems
G05B2219/34—Director, elements to supervisory
G05B2219/34388—Detect correct moment, position, advanced, delayed, then next command
G—PHYSICS
G05—CONTROLLING; REGULATING
G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00—Program-control systems
G05B2219/30—Nc systems
G05B2219/41—Servomotor, servo controller till figures
G05B2219/41457—Superposition of movement
G—PHYSICS
G05—CONTROLLING; REGULATING
G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00—Program-control systems
G05B2219/30—Nc systems
G05B2219/42—Servomotor, servo controller kind till VSS
G05B2219/42249—Relative positioning
G—PHYSICS
G05—CONTROLLING; REGULATING
G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00—Program-control systems
G05B2219/30—Nc systems
G05B2219/42—Servomotor, servo controller kind till VSS
G05B2219/42251—Control position of beam in coordination with xy slide
Abstract
1438414 Automatic control of position INTERNATIONAL BUSINESS MACHINES CORP 20 Aug 1974 [10 Sept 1973] 36497/74 Heading G3N Two elements, e.g. a tool and a workpiece, are brought into precise relative positions by driving one element into a predetermined region using a servo loop, and then driving the second element to a desired position relative to the first element. As shown a workpiece W is mounted on a stage 11 driven by servomotors 12, 13 in response to a desired position address supplied by a control unit 100. The motors receive position feedback through lines 20A, 103A and speed feedback through lines 12A, 13A, When the stage 11 and workpiece W reach a position within a pre-set tolerance of the desired position, motors 12, 13 are stopped by a latching arrangement, and the remaining difference signal between the actual and desired positions of the workpiece W is fed to circuits 75, 104 which control stepping motors 4, 5 so as to move a table 10 to a precisely required position in relation to the workpiece W. The table 10 carries a tool 18A which may be a drill. Alternatively, the system may be used to position an electron beam accurately in relation to a semi-conductor wafer, the final control involving adjustment of the field produced by electrostatic deflection plates. The input to control unit 100 may be from paper or magnetic tape or punched cards, or from a manually operated arrangement such as a keyboard, thumbwheels or switches. A further circuit, known as a ring out circuit, operates to ensure that all motion of the stage 11 has ceased before control is transferred to the table 10. This is done by a logic circuit responsive to the last bit of the signal from a position encoder which checks that the value of the bit does not change during a pre-set time interval.
GB3649774A
1973-09-10
1974-08-20
Positioning apparatus
Expired
GB1438414A
(en)
Applications Claiming Priority (2)
Application Number
Priority Date
Filing Date
Title
US395890A
US3904945A
(en)
1973-09-10
1973-09-10
Precision tool and workpiece positioning apparatus
US395502A
US3886421A
(en)
1973-09-10
1973-09-10
Precision tool and workpiece positioning apparatus with ringout detection
Publications (1)
Publication Number
Publication Date
GB1438414A
true
GB1438414A
(en)
1976-06-09
Family
ID=27015134
Family Applications (1)
Application Number
Title
Priority Date
Filing Date
GB3649774A
Expired
GB1438414A
(en)
1973-09-10
1974-08-20
Positioning apparatus
Country Status (4)
Country
Link
CH
(1)
CH576167A5
(en)
DE
(1)
DE2442679C3
(en)
FR
(1)
FR2246000B1
(en)
GB
(1)
GB1438414A
(en)
Cited By (1)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US4273482A
(en)
*
1978-07-03
1981-06-16
Conti-Form Machine Tools Limited
Automatic tool-moving machine
Families Citing this family (1)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
JPS63206804A
(en)
*
1987-02-24
1988-08-26
Fanuc Ltd
Numerical control system
1974
1974-07-17
FR
FR7425792A
patent/FR2246000B1/fr
not_active
Expired
1974-08-20
GB
GB3649774A
patent/GB1438414A/en
not_active
Expired
1974-09-04
CH
CH1204474A
patent/CH576167A5/xx
not_active
IP Right Cessation
1974-09-06
DE
DE19742442679
patent/DE2442679C3/en
not_active
Expired
Cited By (1)
* Cited by examiner, † Cited by third party
Publication number
Priority date
Publication date
Assignee
Title
US4273482A
(en)
*
1978-07-03
1981-06-16
Conti-Form Machine Tools Limited
Automatic tool-moving machine
Also Published As
Publication number
Publication date
FR2246000A1
(en)
1976-10-22
DE2442679A1
(en)
1975-03-27
DE2442679B2
(en)
1980-02-14
DE2442679C3
(en)
1980-10-02
CH576167A5
(en)
1976-05-31
FR2246000B1
(en)
1976-10-22
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Legal Events
Date
Code
Title
Description
1976-10-20
PS
Patent sealed
1987-04-08
PCNP
Patent ceased through non-payment of renewal fee
