GB1466655A - Creación de Inventos y Patentes con Inteligencia Artificial

GB1466655A – Making a magnetic oxide film
– Google Patents

GB1466655A – Making a magnetic oxide film
– Google Patents
Making a magnetic oxide film

Info

Publication number
GB1466655A

GB1466655A
GB4677775A
GB4677775A
GB1466655A
GB 1466655 A
GB1466655 A
GB 1466655A
GB 4677775 A
GB4677775 A
GB 4677775A
GB 4677775 A
GB4677775 A
GB 4677775A
GB 1466655 A
GB1466655 A
GB 1466655A
Authority
GB
United Kingdom
Prior art keywords
sputtering
oxygen
torr
partial pressure
target
Prior art date
1974-11-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Application number
GB4677775A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nippon Telegraph and Telephone Corp

Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1974-11-12
Filing date
1975-11-12
Publication date
1977-03-09

1975-11-12
Application filed by Nippon Telegraph and Telephone Corp
filed
Critical
Nippon Telegraph and Telephone Corp

1977-03-09
Publication of GB1466655A
publication
Critical
patent/GB1466655A/en

Status
Expired
legal-status
Critical
Current

Links

Espacenet

Global Dossier

Discuss

Classifications

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES

H01F10/00—Thin magnetic films, e.g. of one-domain structure

H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers

H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition

H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds

H01F10/20—Ferrites

C—CHEMISTRY; METALLURGY

C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL

C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL

C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material

C23C14/08—Oxides

C23C14/085—Oxides of iron group metals

H—ELECTRICITY

H01—ELECTRIC ELEMENTS

H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES

H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties

H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates

Abstract

1466655 Forming sputtered magnetic iron oxide films NIPPON TELEGRAPH & TELEPHONE PUBLIC CORP 12 Nov 1975 [12 Nov 1974] 46777/75 Heading C7F Sputtered magnetic iron oxide films are deposited an substrates such as Al and rock salt by sputtering an oxide free target of Fe of Fe alloy in an atmosphere of rare gas and oxygen and maintaining the oxygen partial pressure at 3 x 10-3 to 6 x 10-3 Torr. The target may be pre-sputtered in a mixture of rare gas and oxygen the oxygen partial pressure being less than 3 x 10-3 Torr to remove any oxide film on the target. During pre-sputtering the substrate is protected by a movable shutter and after pre-sputtering the oxygen partial pressure is raised to 3 x 103-6 x 10-3 Torr to effect sputtering, the substrate temperature being held at 150-250C. An R.F. voltage is preferably used for pre-sputtering and sputtering and the volume ratio of argon to oxygen is preferably 4:1 to 9:1. The sputter coated substrate may be annealed.

GB4677775A
1974-11-12
1975-11-12
Making a magnetic oxide film

Expired

GB1466655A
(en)

Applications Claiming Priority (1)

Application Number
Priority Date
Filing Date
Title

JP49130208A

JPS5155995A
(en)

1974-11-12
1974-11-12
Sankabutsujiseihakumakuno seizohoho

Publications (1)

Publication Number
Publication Date

GB1466655A
true

GB1466655A
(en)

1977-03-09

Family
ID=15028665
Family Applications (1)

Application Number
Title
Priority Date
Filing Date

GB4677775A
Expired

GB1466655A
(en)

1974-11-12
1975-11-12
Making a magnetic oxide film

Country Status (6)

Country
Link

US
(1)

US4013534A
(en)

JP
(1)

JPS5155995A
(en)

DE
(1)

DE2549509C3
(en)

FR
(1)

FR2291573A1
(en)

GB
(1)

GB1466655A
(en)

NL
(1)

NL174848C
(en)

Cited By (1)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

DE3413728A1
(en)

1983-04-21
1984-10-25
Multi-Arc Vacuum Systems Inc., Saint Paul, Minn.

TRIGGER AND ARC IGNITION METHOD FOR ELECTRIC ARC EVAPORATION SYSTEMS

Families Citing this family (12)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

JPS52106500A
(en)

1976-03-03
1977-09-07
Fujitsu Ltd
Magnetic recording medium

JPS5329703A
(en)

1976-09-01
1978-03-20
Fujitsu Ltd
Production of thin magnetic film

JPS589221A
(en)

1981-07-10
1983-01-19
Fujitsu Ltd
Manufacture of magnetic recording medium

DE3210351A1
(en)

1982-03-20
1983-09-22
Leybold-Heraeus GmbH, 5000 Köln
Process and device for producing magnetic recording films

US4544612A
(en)

1982-09-22
1985-10-01
Nippon Telegraph & Telephone Public Corporation
Iron oxide magnetic film and process for fabrication thereof

JPS59177726A
(en)

1983-03-28
1984-10-08
Toshiba Corp
Vertical magnetic disc recording medium

JPS59203238A
(en)

1983-04-30
1984-11-17
Tdk Corp
Magnetic recording medium and its production

US5186854A
(en)

1990-05-21
1993-02-16
The United States Of America As Represented By The Secretary Of The Navy
Composites having high magnetic permeability and method of making

US5460704A
(en)

1994-09-28
1995-10-24
Motorola, Inc.
Method of depositing ferrite film

US6638857B1
(en)

2000-03-30
2003-10-28
Triquint Technology Holding Co.
E-beam deposition method and apparatus for providing high purity oxide films

US6827757B2
(en)

2001-11-30
2004-12-07
Jfe Steel Corporation
Magnetite-iron based composite powder, magnetite-iron based powder mixture, method for producing the same, method for remedying polluted soil, water or gases and electromagnetic wave absorber

US7429427B2
(en)

2004-12-06
2008-09-30
Seagate Technology Llc
Granular magnetic recording media with improved grain segregation and corrosion resistance

Family Cites Families (5)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

US3620841A
(en)

1970-02-16
1971-11-16
Ibm
Process for making continuous magnetite films

JPS4941012B1
(en)

1970-06-11
1974-11-06

DE2126887C3
(en)

1971-05-29
1981-11-19
Ibm Deutschland Gmbh, 7000 Stuttgart

Deposition of magnetizable layers by cathode sputtering

US3795542A
(en)

1971-06-09
1974-03-05
Corning Glass Works
Method of making a magnetic recording and storage device

US3829372A
(en)

1972-05-25
1974-08-13
Ibm
Multilayer magnetic structure and methods of making same

1974

1974-11-12
JP
JP49130208A
patent/JPS5155995A/en
active
Granted

1975

1975-10-14
US
US05/621,857
patent/US4013534A/en
not_active
Expired – Lifetime

1975-11-05
DE
DE2549509A
patent/DE2549509C3/en
not_active
Expired

1975-11-05
FR
FR7533819A
patent/FR2291573A1/en
active
Granted

1975-11-11
NL
NLAANVRAGE7513193,A
patent/NL174848C/en
not_active
IP Right Cessation

1975-11-12
GB
GB4677775A
patent/GB1466655A/en
not_active
Expired

Cited By (1)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

DE3413728A1
(en)

1983-04-21
1984-10-25
Multi-Arc Vacuum Systems Inc., Saint Paul, Minn.

TRIGGER AND ARC IGNITION METHOD FOR ELECTRIC ARC EVAPORATION SYSTEMS

Also Published As

Publication number
Publication date

JPS547356B2
(en)

1979-04-05

FR2291573B1
(en)

1980-05-30

US4013534A
(en)

1977-03-22

DE2549509C3
(en)

1981-03-12

NL7513193A
(en)

1976-05-14

NL174848C
(en)

1984-08-16

JPS5155995A
(en)

1976-05-17

NL174848B
(en)

1984-03-16

DE2549509B2
(en)

1980-06-26

DE2549509A1
(en)

1976-05-26

FR2291573A1
(en)

1976-06-11

Información de contacto