GB1586052A - Creación de Inventos y Patentes con Inteligencia Artificial

GB1586052A – Measurement head
– Google Patents

GB1586052A – Measurement head
– Google Patents
Measurement head

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Publication number
GB1586052A

GB1586052A
GB10417/78A
GB1041778A
GB1586052A
GB 1586052 A
GB1586052 A
GB 1586052A
GB 10417/78 A
GB10417/78 A
GB 10417/78A
GB 1041778 A
GB1041778 A
GB 1041778A
GB 1586052 A
GB1586052 A
GB 1586052A
Authority
GB
United Kingdom
Prior art keywords
measurement head
measurement
fact
head according
elements
Prior art date
1977-03-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Application number
GB10417/78A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Carl Zeiss AG

Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1977-03-19
Filing date
1978-03-16
Publication date
1981-03-18
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1978-03-16
Application filed by Carl Zeiss AG
filed
Critical
Carl Zeiss AG

1981-03-18
Publication of GB1586052A
publication
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patent/GB1586052A/en

Status
Expired
legal-status
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Classifications

G—PHYSICS

G01—MEASURING; TESTING

G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS

G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques

G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points

G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines

G01B7/012—Contact-making feeler heads therefor

G—PHYSICS

G01—MEASURING; TESTING

G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS

G01B11/00—Measuring arrangements characterised by the use of optical techniques

G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates

G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines

G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor

Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC

Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

Y10S33/00—Geometrical instruments

Y10S33/02—Air

Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC

Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

Y10S33/00—Geometrical instruments

Y10S33/03—Photoelectric

Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC

Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

Y10S33/00—Geometrical instruments

Y10S33/13—Wire and strain gauges

Description

PATENT SPECIFICATION
Application No 10417/78 ( 22) Filed 16 Mar 1978 Convention Application No 2712181 ( 32) Filed 19 Mar 1977 ( 19) Fed Rep of Germany (DE) in Complete Specification Published 18 Mar 1981
INT CL 3 G Oi B 7/00 l Index at Acceptance GIN 4 C 1 A 2 1 A 3 B 7 H 2 1 A 4 1 D 2 B 7 N 1 H IF IP AGE 2 A 2 3 V 5 4 A GIM 2 F 2 H ( 54) MEASUREMENT HEAD ( 71) We, CARL-ZEISS-STIFTUNG, a foundation established under the laws of Germany, 7920 Heidenheim (Brenz), Wuerttemberg, Germany, trading as CARL ZEISS, do hereby declare the invention, for which we pray that a patent may be granted to us, and the method by which it is to be performed, to be particularly described in and by the following statement:
The present invention relates to a workprobing measurement head for use in a coordinate-measuring machine, for determining the coordinates in space of one or more points of probe contact with a workpiece moved relative to the measurement head More particularly, the invention relates to such a head involving a machine-mountable housing and a probe movably suspended therefrom and equipped with one or more work-contacting probe pins.
Such measurement heads, known also as multicoordinate probes, are known in which the probe pin is fastened to a torsionally rigid succession of linear guidance systems which are free of clearance and friction and are developed as spring parallelograms to implement a three-dimensional coordinate system Upon contact with the workpiece, one of the spring parallelograms is deflected and produces a workcontact pulse via an associated signal generator Such probes are, to be sure, extremely precise but they require a high precision construction and are therefore relatively expensive Furthermore, a force sufficient to deflect the corresponding spring parallelogram is required for development of a workcontact pulse.
A measurement head is also known in which the part secured to the coordinatemeasuring machine is provided with V-bearings in which extensions of circular cross section are connected to the movable probe and engage under spring action Upon contact with the workpiece, the probe carried by the movable measurement-head part moves out of its defined position of rest, whereby at least one of its extensions is lifted out of the corresponding V-bearing In this way, either a circuit is interrupted or a separate switch element is actuated so that a work-contact pulse is produced In this case also, a force sufficient to lift an extension out of the associated bearing is necessary to develop a work-contact pulse.
Finally, there is also known a measurement probe in which the probe itself is movable with respect to a base body, and the relative 55 movement produced upon the touching is measured in the co-ordinate directions by means of capacitive, ohmic, inductive, or pneumatic path transmitters in the coordinate directions When a given work-contacting 60 pressure of the measurement probe against the test piece is reached, the relative movement is disconnected via switches Thus, in this measurement probe also, a force sufficient to introduce a relative movement between 65 probe and base body is required in order to produce the work-contacting signal needed for measurement purposes.
The object of the present invention is now to provide a low-price measurement head in 70 which the force necessary for producing a touching pulse can be maintained practically as small as desired and in which, furthermore, in the event of accidental rapid contact of the workpiece, destruction of the measurement 75 head and/or plastic deformation of the observed object can be avoided.
This object is achieved in accordance with the present invention in the manner that the moving part of the measurement head com 80 prises two members which are rigidly connected with each other and between which there are arranged one or more measurement elements which are sensitive to tension and compression, and that the connection between 85 the mounting part and the moving measurementhead part is effected via a coupling member which in its position of rest very accurately establishes the position in space of the moving measurement-head part 90 As measurement elements there are advisedly employed sensors which respond in highly sensitive manner to mechanical and/or electrical stimuli, for instance strain gauges or piezoelectric elements 95 The moving part of the measurement head itself comprises a first member serving to receive the probe pin and a second member which is connected with the coupling member.
These two parts have flat surfaces adjoining 100 CA ( 21) V) ( 31) =q D ( 33) 00 ( 44) in ( 51) » ( 52) ( 11) 1 586 052 1 586052 each other and are connected together, the measurement elements being interposed between the flat surfaces.
A slight, scarcely measurable force on the probe pin has the result that despite the firm connection of the two parts of the moving part of the measurement head the highly sensitive sensors respond The signal produced by them is fed to a trigger of adjustable level As soon as the signal exceeds such level, a workcontact pulse is released to fixedly establish the positional data being present on the measurement systems of the coordinate measuring machine Electric-switch means for evaluating the signal produced by the measurement-probe elements are advisedly arranged in the measurement head itself.
The sensitivity of the probe pin depends on the adjustment of threshold-signal level If this level is made very low, the resultant high sensitivity necessarily means that a «work-contact» signal will be developed, even in the circumstance of an unintended vibration of the measurement machine or of the measurement head To avoid erroneous measurements as a result, such a false «work-contact» signal, the first «workcontact» pulse, i e, the very first such pulse, is forwarded for determination of the measurement value only if a second pulse, the so-called characterizing pulse, is produced within an adjustably selected period of time.
Upon contact with the workpiece, all relative movement of the workpiece with respect to the measurement machine is braked, upon ocurrence of the initial «work-contacting» pulse Since this braking cannot take place abruptly for considerations of momentum, the probe pin will rest for a certain period of time against the workpiece During this period of time, elastic deformations of the probe pin occur, and finally the coupling member between the fixed and the movable parts of the measurement head yields, so that the probe-pin deformation can be relieved.
This course of events in the work-contacting process makes it possible to derive the characterizing pulse either ( 1) after a predetermined period of time and from the measurementprobe elements themselves, or ( 2) to provide in the coupling member a switch element which produces such second pulse upon a deformationrelieving movement of the probe pin.
To make possible the use of long narrow probe pins and at the same time to obtain the initial «work-contact» pulse upon very first contact with the workpiece, it is advantageous to arrange the measurement elements in the immediate vicinity of a work-contact ball of the probe pin.
Coupling mechanism between the fixed part and the moving part of the measurement head can be variously developed It must provide assurance that upon a lifting of the probe pin from the workpiece, the threedimensional position of the probe pin which then stands free is restored again with a high degree of precision.
Various possible developments of the coupling mechanism will be described in further detail below, in conjunction with the accom 70 panying drawings which show various illustrative embodiments of the measurement head of the present invention.
In said drawings:
Figure 1 is a side view of one embodiment 75 of the measurement head, a portion of the mounting part being broken-away to reveal contents; Figure 2 is a fragmentary vertical sectional view of the movable part of the measurement 80 head of Figure 1; Figure 3 is a fragmentary section view through another embodiment of the measurement head; Figure 4 is a sectional view along the line 85 IV-IV of Figure 3; Figure 5 is a top view of an embodiment of an intermediate ring which may be used with either of the measurements heads of Figure 2 or Figure 3; 90 Figure 6 is a fragmentary sectional view through an intermediate ring equipped with air-bearing means which provides suspension via a spherical cushion of air; Figure 7 graphically shows typical time 95 variation of the signal generated when one of the measurement-probe elements contacts a Figure 8 is a fragmentary sectional view through another embodiment of the movable 100 part of the measurement head; Figure 9 is a sectional view along the line IX-IX of Figure 8; and Figures 10 & 11 are fragmentary sectional views through further embodiments of the 105 measurement head.
In Figure 1, 1 is the mounting part of the measurement head which is suitably connected via a mounting flange 2 to a coordinate measuring machine, not shown in the drawing The 110 part of the measurement head which is movable with respect to the part 1 is designated 3 and carries probe-pin means 4 The fixed part 1 is provided with angularly spaced axial extensions la, lb and lc, to each of which one of three 115 bearing balls ( 5 a, 5 b, 5 c) is firmly connected.
The movable part 3 of the measurement head consists, as shown in Figure 2, of two parts 3 a and 3 b, the flat surfaces of which adjoin each other along the upper edge of the 120 part 3 a The parts 3 a and 3 b are firmly connected to each other, via three piezoelectric elements uniformly distributed over the periphery; said piezoelectric elements are highly sensitive to tension and compression, and 125 they are bonded to both parts 3 a and 3 b to establish the connection therebetween One of these elements can be noted in Figure 2 and is designated 6.
Three bearing balls 7 a, 7 b and 7 c are 130 1 586 052 distributed uniformly over the circumference at one side of part 3 b and fixed to flat part 3 b, the ball 7 a being visible in Figure 2.
8 is an intermediate ring which in the embodiment shown has three bearings 8 a, 8 b, 8 c uniformly distributed over its circumference; it is later explained (in connected with Figure 5) that the bearings are preferably different at locations 8 a, 8 b, 8 c, radially directed V-groove bearings being shown at 8 a and 8 c In the fixed part 1, there is arranged a tension spring 9 which is connected via chains or wires with the intermediate ring 8, springloading the latter against part 1 In this connection, the balls 5 a, 5 b and Sc are spring-loaded in their engagement with bearings 8 a, 8 b, 8 c of the intermediate ring 8.
The moving part 3 engages, by means of its balls 7 a, 7 b, 7 c into the correspondingly spaced bearings 8 a, 8 b, 8 c of the intermediate ring 8 and is held in position of rest by means of an.
angularly spaced plurality of magnets, one pair of which is designated 10, it being understood that the ring 8 and part 3 b are of non-magnetic material.
Electric signal-processing switch elements 11 are arranged in part 3 a and serve to transform the signals supplied by the measurement element 6 into the actual measurement signal.
In operation, the measurement head of Figures 1 and 2 is moved, by a slide oi other movable part of the measurement machine, towards the portion of the workpiece to be contacted for measurement Upon the initial contact of the probe pin with the workpiece, the measurement elements 6 respond and produce a signal, the envelope profile of which is shown by way of example in Figure 7 The switch elements 11 contain a trigger of adjustable threshold level As soon as the measurement signal exceeds the threshold level of the trigger, a pulse is generated to establish, for the measurement systems of the measuring machine, a fix of the then-applicable positional data for the measurement probe; the time of this fix is designated t 1 in Figure 7 Then, in the further course of the work-contacting process, all movements of the measurement machine are braked, and first elastic deformations of the probe pin 4 occur The force on this probe pin and thus on the moving part 3 increases until part 3 finally:moves with respect to the intermediate ring 8 In this way, relieving movement of the probe pin 4 (together with the moving part 3) is made possible thus preventing damage to the measurement head and also avoiding plastic deformation of the workpiece which has been contacted.
Upon relieving movement of the moving part 3, at least one of the bearing balls 5 a, 5 b, Sc or 7 a, 7 b, 7 c lifts out of its associated bearing on the intermediate ring 8.
If the trigger threshold level is set low, i e.
with high sensitivity of the measurement head, another inquiry is made by the circuitry at switch elements 11, after an adjustable period of time (e g, at the time designated t 2 in Figure 7) as to whether an output-signal voltage is still being developed at measurement elements 6 Since the time interval t 2 -tl is short (e g, in the order of magnitude of 100 70 ms), such a voltage is in all cases present, and a second pulse, the so-called characterizing pulse, is produced This second pulse is operative to forward to an evaluation circuit (not shown, but forming part of the measuring 75 machine) the pulse derived from first probe contact with the workpiece.
When the braking process is completed and the probe 4 moves in relief of the force of its contact with the workpiece, the three-dimen 80 sional position of the thus-relieved probe pin 4 is again re-established accurately, via the spring-loaded suspension shown in Figures 1 and 2; whereby the measurement machine may be advanced to the next point of work 85 contact, for another cycle of probe-actuated positional data fixing.
If the measurement head is used to probe an internal surface, for instance, a horizontal bore hold of a workpiece, one of the hori 90 zontal pin extensions of the probe means 4 of Figure 1 is employed to contact such inner surface of the workpiece Then, upon machinedriven upward movement of the measurement head, the intermediate ring 8 (together with 95 the moving part 3) is displaced with respect to the fixed part 1, the bearing balls 5 a, 5 b, Sc being axially moved out of their corresponding bearings ( 8 a, 8 b, 8 c) on the intermediate ring 8 It will be understood that with the described 100 construction of the coupling member, destruction of or damage to the probe system is avoided upon an upward movement of the measurement head.
In the embodiment shown in Figures 3 and 105 4, the mounting part of the measurement-head is designated 12; and the moving measurementhead part consists of the two parts 13 a and 13 b which are firmly connected with each other and carry the probe pin 14 The parts 110 14 a and 13 b adjoin each other along flat surfaces and the displacement-sensitive measurement elements 16 a, 16 b, 16 c, 16 d and 16 e (which may, for instance, be piezoelectric elements) are arranged between then The 115 elements 16 a and 16 b respond, for instance to work-contact force in the x-direction, while the elements 16 d and 16 c similarly respond in the y-direction, and the element 16 e provides similar response to contact force in 120 the z-direction.
The moving part 13 b carries three bearing balls 17 a, 17 b and 17 c at uniform angularly spaced peripheral locations, the balls 17 a and 17 b being visible in the sectional view of 125 Figure 3 Three angularly spaced bearing balls a, 15 b, 1 Sc are fixed to the mounting part 12 of the measurement-head An intermediate ring 18 which, in the examples shown, has three V-bearings 18 a, 18 b, 18 c distributed 130 1 586052 uniformly around its circumference, is shown engaging the bearing balls 17 a and 1 Sa at Vbearings 18 a; ring 18 is also shown engaging balls 15 b and 17 b at V-bearing 18 b, but the locations of V-bearings 18 a-18 b-18 c will be understood to be 120 apart Coil-spring means designated 19 presses the intermediate ring 18 against the fixed part 12, and a tension spring resiliently loads the movable part 13 b against the intermediate ring 18.
Operation of the measurement head shown in Figures 3 and 4 corresponds essentially to that of the measurement head of Figures 1 and 2 In this case also, upon deflection in xand y-directions, the movable measurementhead parts 13 a and 13 b (together with the probe pin 14) move relative to the intermediate ring 18, at least one of the balls 17 a, 17 b, 17 c or 1 Sa, 15 b, 1 Sc leaving the associated Vbearing in ring 18.
The intermediate ring 18 of Figure 3 is provided with V-bearings in the examples shown However, it is also possible to replace these V-bearings with other bearings, as shown in the example of Figure 5 The intermediate ring designated 28 therein bears two V-bearings 21 and 22, as well as two flat bearing plates 23 and 24 Another bearing 25 is developed as a concave or negative form of a pyramid apex The effect obtainable with this bearing, namely the precise locating of the bearing ball, can also be obtained by means of a bearing 26 which consists of three balls in whose center the bearing ball then engages In the embodiment of Figure 1, it is preferred that bearings corresponding to the bearings 21, 23 and 25 of Figure 5 are used at locations 8 a, 8 b, 8 c in the intermediate ring 8, it being understood that the axial elevation of each of these bearings 21, 23, 25 is such as to receive bearing valls 5 a, 5 b, Sc and 7 a, 7 b, 7 c and to position parts 1 and 3 in axial alignments, in absence of work contact.
Figure 6 is a fragmentary sectional view through a movable measurement-head disc part 33 carrying a plurality of angularly spaced bearing balls 35 Here, there is associated with the measurement-head part 33 an intermediate ring 38 which has bearing places developed in the shape of spherical concavities, which may, for instance, be produced by using corresponding bearing balls in the part 33 to mold inserts 39, shown in the intermediate ring 38 Air is advisedly blown into the bearing region through a bore hole 34, so that the ball 35 rests on a thin cushion of air Via a bore hole 32, pneumatic pressure-responsive means 31 is mounted to respond to very slight changes in the cushion or gap width between the parts 35 and 39 It will be understood that such pneumatic measurement means can be used as trigger means to release the second pulse of the described workcontacting process, for example, at detected achievement of the same pressure level at the pneumatic means 31 associated with each of the plural angularly spaced air-cushion bearings involved in suspending part 33 with respect to ring 38.
Figures 8 and 9 show a probe pin which consists of the two parts 44 and 45 These two 70 parts are firmly axially connected with each other via radially compliant extensions 45 a, b, and 45 c Between them a tripartite piezoelectric element 46 is arranged By means of this element all three coordinate directions 75 can be covered.
The probe pin of Figures 8 and 9 has the advantage that the contact-sensitive measurement element 46 is arranged in the direct vicinity of the work-contact ball Thus, upon 80 contact with a workpiece, a work-contact pulse is immediately produced, without transmitting this pulse by sound condition to the above-described measurement elements The probe-pin part 44 can therefore be and is 85 preferably long and narrow, while also providing very exact and accurately reproducible work-contacting measurement signals.
Figure 10 shows another embodiment of a measurement head, wherein the mounting 90 part of the measurement-head is designated 52, while the movable measurement-head part (which carries the probe pin 54) is designated 55 Between the parts 52 and 55 there is arranged a spring bellow 56 which is filled 95 with oil to increase the internal friction of the system Piezoelectric measurement elements are arranged in the probe pin 54 of the movable measurement head part 55, as in Figure 8 and Figure 9 already discussed 100 Figure 10 additionally serves to illustrate that work-contact signals may be developed via straingage means on the coupling member 56; thus, the spring bellows may be provided with one or more strain gages 57 (e g, in a 105 Wheatstone bridge) which upon a relieving movement of the probe pin 54 will deliver a signal which can be processed to form the second pulse.
Instead of the spring bellows 56 of 110 Figure 10, a coil spring may also be provided.
And in all cases, it will be understood to be necessary for the coupling system to exactly define and restore the three-dimensional position of the probe pin, in its free-standing (i e, non 115 work-contacting) orientation.
The embodiment of the measurement head shown in Figure 11 will be recognised as corresponding essentially in its construction to that of Figure 3 The mounting part 62 which is 120 adapted to be fixed to the measuring machine is articulately connected via an intermediate ring 68 with the deflectable part 63, and the part 63 bears a probe pin 64 A concave mirror 65 is fixed on the intermediate ring 125 68 Said mirror focuses light from a source 66 (which is fixed to the mounting part 62) onto a receiver 67 which is also fixed to part 62 This receiver may, for instance, be a fourquadrant photodiode In condition of rest, all 130 1 586052 four quadrants of the receiver are uniformly acted on, so that subsequent switch elements do not supply a signal Bus as soon as the part 63 is deflected, the receiver 67 supplies an output signal, which can be used to produce a characterizing pulse.
Furthermore, with the arrangement shown in Figure 11, the maintaining of the precise zero position of the deflectable part 63 when the feeler pin 64 is standing free can be automatically monitored, for the condition of equal outputs for all four quadrants.
As shown by the foregoing description, all embodiments of the measurement head are of simple and economical construction Only very small masses need be moved so that small dynamic forces and little strain are imposed on the measuring machine The new measurement head makes possible a rapid work-contacting procedure and therefore permits of different contacts in rapid sequence, whereby the measurement time can be decreased as compared with known systems.

Claims (1)

WHAT WE CLAIM IS:
1 Measurement head for determining the coordinates in space of any points of a workpiece moved relative to the measurement head, comprising a mounting part which is adapted to be fixly mounted to a coordinate measuring machine and a part movable relative to same and bearing one or more probe pins, characterized by the fact that the movable part of the measurement head comprises two members which are connected together and between which one or more measurement elements being sensitive to tension and compression are arranged and by the fact that the connection between the mounting part and the movable part of the measurement head comprises a coupling member which in its position of rest establishes, the position in space of the movable part of the measurement head and during workpiece contacting movement allows displacement of the probe pins in all spatial directions.
2 Measurement head according to Claim 1, characterized by the fact that as measurement elements piezoelectric elements are used.
3 Measurement head according to Claims 1 and 2, characterized by the fact that the first member of the movable part of the measurement head is adapted to receive the probe pin and the second member is connected with the coupling member and by the fact that the two members are connected together with flat surfaces adjoining each other; the measurement elements being interposed between said flat surfaces.
4 Measurement head according to Claims 1 to 3, characterized by the fact that an arrangement is providcd which, after the initial probe contact with the workpiece develops a characterizing pulse within an adjustable period of time (t 2 -t 1) and that the first work-contact pulse is forwarded for the determination of the value only after development of said characterizing pulse.
Measurement head according to Claims 1 to 4, characterized by the fact that the measurement elements are connected with 70 signal-processing electric-switch elements arranged in the measurement head and serving to transform the measurement signals into initial-contact pulses and characterizing pulses.
6 Measurement head according to Claims 1 75 to 5, characterised by the fact that the measurement elements are arranged in the immediate vicinity of the probe ball of the probe pin.
7 Measurement head according to Claim 1 to 6, characterized by the fact that both on 80 the mounting part and on the movable probe part there are fastened at least three balls which are distributed uniformly around the circumference and arranged in a plane, that an intermediate ring provided with at least 85 three mating bearings is so arranged that the balls of the mounting part and of the moving measurement head part engage into its bearings, and that spring elements are provided which resiliently hold the two measurement-head 90 parts and the intermediate ring in their position.
8 Measurement head according to Claim 7, characterized by the fact that the intermediate ring contains, for each of the mounting part and movable measurement head part, at 95 least one bearing developed as the negative form of a pyramid apex, at least one V-bearing and at least one flat bearing plate.
9 Measurement head according to Claim 7, characterized by the fact that the bearings of 100 the intermediate ring are developed as spherical pressurefluid cushions.
Measurement head according to Claim 9, wherein said cushions are produced by a continuous flow of air 105 11 Measurement head according to Claims 1 to 6, characterized by the fact that a coil spring is provided as coupling member between its mounting part and its moving part.
12 Measurement head according to Claim 110 1 to 6, characterized by the fact that an oilfilled spring bellows is provided as coupling member between its mounting part and its moving part.
13 Measurement head according to Claim 115 1 and one or more of the following claims, characterized by the fact that the characterizing pulse which serves for the actuating of the first initial-contact pulse is produced by or derived from the measurement elements 120 14 Measurement head according to Claim 1 and one or more of the following claims, characterized by the fact that switch elements are provided in the coupling member in order to produce the characterizing pulse 125 Measurement head according to Claim 1 to 6, characterized by the fact that a mirror is fastened to the coupling member, said mirror serving to deflect the radiation coming from a source which is attached to the housing 130 6 1 586052 6 to a receiver which is attached to the housing.
16 Measurement head according to Claim 15, characterized by the fact that the mirror is developed as concave mirror and the receiver is developed as a four-quadrant receiver 5 CARL ZEISS-STIFTUNG, Printed for Her Majesty’s Stationery Office by MULTIPLEX techniques ltd, St Mary Cray, Kent 1981 Published at the Patent Office, 25 Southampton Buildings, London WC 2 l AY, from which copies may be obtained.

GB10417/78A
1977-03-19
1978-03-16
Measurement head

Expired

GB1586052A
(en)

Applications Claiming Priority (1)

Application Number
Priority Date
Filing Date
Title

DE2712181A

DE2712181C3
(en)

1977-03-19
1977-03-19

Touch probe

Publications (1)

Publication Number
Publication Date

GB1586052A
true

GB1586052A
(en)

1981-03-18

Family
ID=6004133
Family Applications (1)

Application Number
Title
Priority Date
Filing Date

GB10417/78A
Expired

GB1586052A
(en)

1977-03-19
1978-03-16
Measurement head

Country Status (7)

Country
Link

US
(1)

US4177568A
(en)

JP
(1)

JPS6048681B2
(en)

CH
(1)

CH625045A5
(en)

DE
(1)

DE2712181C3
(en)

FR
(1)

FR2384230A1
(en)

GB
(1)

GB1586052A
(en)

IT
(1)

IT1102107B
(en)

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1985-03-27
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1986-09-17
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1987-10-27
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(en)

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1988-02-03
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US4769919A
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1988-09-13
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(en)

1986-09-03
1990-04-10
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US5228352A
(en)

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1993-07-20
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(en)

2000-06-23
2002-01-23
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US11209258B2
(en)

2017-01-18
2021-12-28
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Priority date
Publication date
Assignee
Title

GB1568053A
(en)

1975-10-04
1980-05-21
Rolls Royce
Contactsensing probe

GB1589297A
(en)

1976-12-24
1981-05-13
Rolls Royce
Probe for use in measuring apparatus

IT1088539B
(en)

1976-12-24
1985-06-10
Rolls Royce

PROBE FOR USE IN MEASURING EQUIPMENT

IT1107310B
(en)

1978-03-23
1985-11-25
Dea Spa

ATTACK GROUP FOR PRECISION AND SAFETY ASSEMBLY OF A TOOL ON A MACHINE, PARTICULARLY A MEASURING MACHINE

JPS5711504Y2
(en)

1978-05-29
1982-03-06

FR2458791A1
(en)

1979-06-13
1981-01-02
Seiv Automation

NUMERICALLY CONTROLLED MEASURING DEVICE

DE2937431A1
(en)

1979-09-15
1981-04-02
Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar

DEVICE FOR MEASURING VALUES ON TEST UNITS

SU1095065A2
(en)

1979-11-05
1984-05-30
Вильнюсский Филиал Экспериментального Научно-Исследовательского Института Металлорежущих Станков
Measuring head

DE2947394A1
(en)

1979-11-24
1981-05-27
Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar

DEVICE FOR MEASURING VALUES ON TEST UNITS

JPS5733301A
(en)

1980-08-08
1982-02-23
Mitsutoyo Mfg Co Ltd
Copying probe for coordinate measuring machine

DD152853A1
(en)

1980-09-01
1981-12-09
Horst Donat

ALTERNATING DEVICE FOR MEASURING APPLICATOR ON TEST POTS

JPS57170006U
(en)

1981-04-21
1982-10-26

JPS5844302A
(en)

1981-06-30
1983-03-15
レニショウ　パブリック　リミテッド　カンパニー
Measuring probe

DE3135495C2
(en)

1981-09-08
1983-11-10
Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf

Measuring head for measuring devices, multi-coordinate measuring devices and processing machines

JPS58140404U
(en)

1982-03-16
1983-09-21
株式会社ミツトヨ

touch signal probe

DE3215878A1
(en)

1982-04-29
1983-11-03
Fa. Carl Zeiss, 7920 Heidenheim

PROBE HEAD FOR COORDINATE MEASURING DEVICES

DE3229992C2
(en)

1982-08-12
1986-02-06
Dr. Johannes Heidenhain Gmbh, 8225 Traunreut

Multi-coordinate probe

ATE26616T1
(en)

1982-08-12
1987-05-15
Heidenhain Gmbh Dr Johannes

PROBE WITH OVERLOAD PROTECTION.

DE3231160C2
(en)

1982-08-21
1985-11-07
Dr. Johannes Heidenhain Gmbh, 8225 Traunreut

Multi-coordinate probe

DE3231158C2
(en)

1982-08-21
1985-11-14
Dr. Johannes Heidenhain Gmbh, 8225 Traunreut

Multi-coordinate probe

DE3234471C1
(en)

1982-09-17
1983-08-25
Dr. Johannes Heidenhain Gmbh, 8225 Traunreut

Multi-coordinate probe

DE3234851C2
(en)

1982-09-21
1985-11-14
Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf

Dynamic probe head

DE3320127C2
(en)

1983-06-03
1994-09-08
Zeiss Carl Fa

Stylus change holder

GB8407847D0
(en)

1984-03-27
1984-05-02
Emi Ltd
Sensing apparatus

DE3427413C1
(en)

1984-07-25
1986-01-02
Dr. Johannes Heidenhain Gmbh, 8225 Traunreut

Probe device

JPS61108904U
(en)

1984-12-20
1986-07-10

DE3506892A1
(en)

1985-02-27
1986-09-04
Fa. Carl Zeiss, 7920 Heidenheim
Probe for coordinate measuring machines

JPS61180475U
(en)

1985-04-30
1986-11-11

JPS6254705U
(en)

1985-09-26
1987-04-04

GB8610087D0
(en)

1986-04-24
1986-05-29
Renishaw Plc
Probe

DE3623614A1
(en)

1986-07-12
1988-01-14
Zeiss Carl Fa

COORDINATE MEASURING DEVICE WITH A SWITCHING TYPE PROBE

DE3634689A1
(en)

1986-10-11
1988-04-14
Zeiss Carl Fa

ARRANGEMENT FOR THE SIMULTANEOUS CONNECTION OF SEVERAL PROBE HEADS OF THE SWITCHING TYPE TO THE ARM OF A COORDINATE MEASURING DEVICE

JPS6363984U
(en)

1986-10-15
1988-04-27

DE3640160A1
(en)

1986-11-25
1988-06-01
Heidenhain Gmbh Dr Johannes

MULTICOORDINATE PROBE

JPS63108178U
(en)

1986-12-29
1988-07-12

DE8700885U1
(en)

1987-01-20
1987-03-05
Fa. Carl Zeiss, 7920 Heidenheim, De

US4763417A
(en)

1987-03-02
1988-08-16
Dr. Johannes Heidenhain Gmbh
Multi-coordinate probe

DE3717459A1
(en)

1987-05-23
1988-12-01
Zeiss Carl Fa

HAND-HELD COORDINATE MEASURING DEVICE

DE3725205A1
(en)

1987-07-30
1989-02-09
Zeiss Carl Fa

PROBE HEAD FOR COORDINATE MEASURING DEVICES

DE3728578A1
(en)

1987-08-27
1989-03-09
Zeiss Carl Fa

KEY SYSTEM FOR COORDINATE MEASURING DEVICES

GB8728500D0
(en)

1987-12-05
1988-01-13
Renishaw Plc
Position sensing probe

DE3831975A1
(en)

1988-04-12
1989-10-26
Wegu Messtechnik

PIEZO CONTROLLED DYNAMIC PROBE

GB8815984D0
(en)

1988-07-05
1988-08-10
Univ Brunel
Probes

DE3824548A1
(en)

1988-07-20
1990-01-25
Zeiss Carl Fa

METHOD AND DEVICE FOR OPERATING A PROBE OF THE SWITCHING TYPE

FR2644883B1
(en)

1989-03-23
1992-11-20
Commissariat Energie Atomique

MULTIDIRECTIONAL CONTACT SENSOR FOR CONTROL MACHINES

EP0415579A1
(en)

1989-08-30
1991-03-06
Renishaw plc
Touch probe

US5209131A
(en)

1989-11-03
1993-05-11
Rank Taylor Hobson
Metrology

GB9000894D0
(en)

1990-01-16
1990-03-14
Nat Res Dev
Probes

US5339535A
(en)

1990-02-23
1994-08-23
Renishaw Metrology Limited
Touch probe

US5345690A
(en)

1990-02-23
1994-09-13
Renishaw Metrology Limited
Contact probes

GB9004117D0
(en)

1990-02-23
1990-04-18
Renishaw Plc
Touch probe

US5491904A
(en)

1990-02-23
1996-02-20
Mcmurtry; David R.
Touch probe

US5253428A
(en)

1990-02-23
1993-10-19
Renishaw Plc
Touch probe

US5505005A
(en)

1990-02-23
1996-04-09
Renishaw Plc
Touch probe

JPH03110779U
(en)

1990-02-26
1991-11-13

DE4039336C5
(en)

1990-12-10
2004-07-01
Carl Zeiss

Process for fast workpiece temperature measurement on coordinate measuring machines

FR2673468A1
(en)

1991-02-28
1992-09-04
Renishaw Plc

SIGNAL CONDITIONING CIRCUIT FOR A TRIGGERED PROBE.

DE4123081C2
(en)

1991-07-12
2001-05-17
Zeiss Carl

Switching type probe

US5322007A
(en)

1991-08-15
1994-06-21
Heat And Control, Inc.
Compact, high-capacity oven

WO1993009398A1
(en)

1991-11-09
1993-05-13
Renishaw Metrology Limited
Touch probe

DE4204602A1
(en)

1992-02-15
1993-08-19
Zeiss Carl Fa

METHOD FOR MEASURING COORDINATES ON WORKPIECES

DE4209829A1
(en)

1992-03-26
1993-09-30
Max Hobe

Precision coupling for use in a probe of a measuring device

DE69323289T3
(en)

1992-12-24
2003-04-24
Renishaw Plc

Probe and signal processing circuit therefor

DE4300026A1
(en)

1993-01-02
1994-07-07
Andreas Lotze
Sensing head for coordinate measurement device

GB9305687D0
(en)

1993-03-19
1993-05-05
Renishaw Metrology Ltd
A signal processing for trigger probe

DE4316236C1
(en)

1993-05-14
1994-07-21
Leitz Mestechnik Gmbh
Workpiece contact point coordinates measuring method

DE4331069A1
(en)

1993-09-13
1995-03-16
Zeiss Carl Fa

Coordinate measuring machine with a probe in the form of a solid-state vibrator

GB9415338D0
(en)

1994-07-29
1994-09-21
Renishaw Plc
Trigger probe circuit

DE4445331C5
(en)

1994-12-19
2006-07-27
Mycrona Gesellschaft für innovative Messtechnik mbH

Automatic multi-sensor measuring head for coordinate measuring machines

DE19525592A1
(en)

1995-07-13
1997-01-16
Zeiss Carl Fa

Procedure for coordinate measurement on workpieces

DE69617148T3
(en)

1995-09-25
2005-11-10
Mitutoyo Corp., Kawasaki

probe sample

DE19547977A1
(en)

1995-12-21
1997-06-26
Zeiss Carl Fa

Touch probe for coordinate measuring machines

DE19630823C1
(en)

1996-07-31
1997-12-11
Zeiss Carl Fa
Coordinate measuring device with collision protection

EP0897100B1
(en)

1997-02-17
2012-02-08
Mitutoyo Corporation
Nondirectional touch signal probe

US6131301A
(en)

1997-07-18
2000-10-17
Renishaw Plc
Method of and apparatus for measuring workpieces using a coordinate positioning machine

JP3126114B2
(en)

1997-11-12
2001-01-22
株式会社ミツトヨ

Non-contact surface roughness measuring device

DE20006504U1
(en)

2000-04-08
2000-08-17
Brown & Sharpe Gmbh

Probe head with exchangeable stylus

DE60235848D1
(en)

2001-09-05
2010-05-12
Renishaw Plc

probe control

GB0207912D0
(en)

2002-04-05
2002-05-15
Renishaw Plc
Kinematic coupling

US20040125382A1
(en)

2002-12-30
2004-07-01
Banks Anton G.
Optically triggered probe

EP1443301B1
(en)

2003-01-29
2010-02-10
Tesa SA
Steerable feeler head

EP1443300B1
(en)

2003-01-29
2010-02-24
Tesa SA
Steerable feeler head

DE10336808A1
(en)

2003-08-07
2005-03-03
Dr. Johannes Heidenhain Gmbh

Method for setting a switching threshold of a push-button switch

US7549345B2
(en)

2004-06-14
2009-06-23
Surface Technology Holdings, Ltd.
Method and apparatus for sensing distortion

DE102005043454B3
(en)

2005-09-13
2007-05-03
Carl Zeiss Industrielle Messtechnik Gmbh

changer

DE102007013916B4
(en)

2007-03-20
2011-06-22
Feinmess Suhl GmbH, 98527

Contour measuring device

CN101408418B
(en)

2007-10-12
2011-03-30
鸿富锦精密工业（深圳）有限公司
Contact measuring apparatus

EP2161536A1
(en)

2008-09-05
2010-03-10
Leica Geosystems AG
Optical sensor with collision protection for a measuring machine

IT1403845B1
(en)

2010-10-29
2013-11-08
Marposs Spa

PROBE PROBE AND RELATIVE CONTROL METHOD

IT1402715B1
(en)

2010-10-29
2013-09-18
Marposs Spa

PROBE PROBE

DE102014201438B4
(en)

2014-01-27
2023-01-26
Carl Zeiss Industrielle Messtechnik Gmbh

Device and method for mounting a detection device for detecting properties of a measurement object

EP3236194B1
(en)

2016-04-18
2018-10-31
Hexagon Metrology GmbH
Coordinate measuring machine with an analogue touch probe, and method for measuring a workpiece by means of a coordinate measuring machine

IT201900006536A1
(en)

2019-05-06
2020-11-06
Marposs Spa

PROBE FOR CHECKING THE POSITION OR LINEAR DIMENSIONS OF A MECHANICAL PART

DE102020113401A1
(en)

2020-05-18
2021-11-18
Haimer Gmbh

Coupling element for receiving a stylus tip in a stylus measuring instrument, screw insert for receiving a stylus tip in a stylus measuring instrument, coupling arrangement for a stylus insert in a stylus measuring instrument, stylus measuring instrument (s)

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1952-01-15
1953-12-28
Centre Nat Rech Scient

Precision electromechanical comparator for remote measurement

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1957-03-29

Grinding or boring machine tool

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1958-04-03
1962-04-10
Sheffield Corp
Gaging device

FR1470705A
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1966-03-04
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Photoelectric sounding device for contour following devices

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1968-02-07
1976-11-18
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ELECTRIC, CONTACTLESS COPY PROBE FOR REFORMING DEVICES ON MACHINE TOOLS

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1971-05-05
1973-05-11
Combustible Nucleaire

GB1445977A
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1972-09-21
1976-08-11
Rolls Royce
Probes

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1972-12-26
1975-05-20
Cecil Equipment Co
Proportional control for guidance system

DE2356030C3
(en)

1973-11-09
1978-05-11
Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar

Button for touching the workpiece

JPS50151170A
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1974-05-27
1975-12-04

DE2551361A1
(en)

1974-11-18
1976-06-24
Dea Digital Electronic

ALL-SIDE ACTING ELECTRONIC PROBE FOR MEASURING MACHINES

FR2298084A1
(en)

1975-01-17
1976-08-13
Erap
Feeler device for reconstructing shape of object – has feeler rod fitted with extensometer gauge bridge

GB1568053A
(en)

1975-10-04
1980-05-21
Rolls Royce
Contactsensing probe

CH599534A5
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1975-10-23
1978-05-31
Tesa Sa
Electrical feeler probe system

IT1088539B
(en)

1976-12-24
1985-06-10
Rolls Royce

PROBE FOR USE IN MEASURING EQUIPMENT

GB1593682A
(en)

1977-01-20
1981-07-22
Rolls Royce
Probe for use in mearusing apparatus

1977

1977-03-19
DE
DE2712181A
patent/DE2712181C3/en
not_active
Expired

1978

1978-02-08
CH
CH138378A
patent/CH625045A5/de
unknown

1978-03-16
GB
GB10417/78A
patent/GB1586052A/en
not_active
Expired

1978-03-16
JP
JP53030500A
patent/JPS6048681B2/en
not_active
Expired

1978-03-16
US
US05/887,241
patent/US4177568A/en
not_active
Expired – Lifetime

1978-03-17
IT
IT48491/78A
patent/IT1102107B/en
active

1978-03-20
FR
FR7807959A
patent/FR2384230A1/en
active
Granted

Cited By (20)

* Cited by examiner, † Cited by third party

Publication number
Priority date
Publication date
Assignee
Title

GB2121966A
(en)

1982-06-14
1984-01-04
Valeron Corp
Touch probe apparatus

US4451987A
(en)

1982-06-14
1984-06-05
The Valeron Corporation
Touch probe

GB2145523A
(en)

1983-08-26
1985-03-27
Gte Valeron Corp
Coatings for contacts of a touch probe

GB2193319B
(en)

1984-07-26
1989-05-24
Nobuyuki Sugimura
Nc lathe screw thread measurement

GB2193319A
(en)

1984-07-26
1988-02-03
Nobuyuki Sugimura
Sensor for measuring screw threads

US4702013A
(en)

1984-12-17
1987-10-27
Renishaw Plc
Probe for sensing contact via acceleration

EP0205528B1
(en)

1984-12-17
1990-09-05
Renishaw plc
Contact-sensing probe

US4780963A
(en)

1984-12-17
1988-11-01
Renishaw Plc
Probe for sensing contact via acceleration

US4854050A
(en)

1984-12-17
1989-08-08
Renishaw Plc
Contact-sensing probe

EP0194386A3
(en)

1985-01-17
1988-10-12
Emi Limited
Control system for a robotic gripper

EP0194386A2
(en)

1985-01-17
1986-09-17
Manufacturing Joint Ventures International Limited
Sensor and control system for a robotic gripper

US4687979A
(en)

1985-01-17
1987-08-18
Emi Limited
Control system for a robotic gripper

US4769919A
(en)

1986-04-17
1988-09-13
Renishaw Plc
Contact-sensing probe

US4916339A
(en)

1986-09-03
1990-04-10
Renishaw Plc
Signal processing for contact-sensing probe

US5228352A
(en)

1991-07-03
1993-07-20
Renishaw Metrology Limited
Signal processing circuit for trigger probe

GB2364389A
(en)

2000-06-23
2002-01-23
Mitutoyo Corp
Touch signal probe

US6516529B2
(en)

2000-06-23
2003-02-11
Mitutoyo Corporation
Touch signal probe

GB2364389B
(en)

2000-06-23
2003-10-22
Mitutoyo Corp
Touch signal probe

US11209258B2
(en)

2017-01-18
2021-12-28
Renishaw Plc
Machine tool apparatus

US11674789B2
(en)

2017-01-18
2023-06-13
Renishaw Plc
Machine tool apparatus

Also Published As

Publication number
Publication date

DE2712181A1
(en)

1978-09-21

FR2384230B1
(en)

1984-12-28

JPS6048681B2
(en)

1985-10-29

IT7848491D0
(en)

1978-03-17

JPS53117464A
(en)

1978-10-13

DE2712181C3
(en)

1981-01-22

DE2712181B2
(en)

1980-04-30

CH625045A5
(en)

1981-08-31

FR2384230A1
(en)

1978-10-13

US4177568A
(en)

1979-12-11

IT1102107B
(en)

1985-10-07

Información de contacto